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首页> 外文期刊>Optical engineering >Passive aligned assembly of an integrated optical displacement sensor based on a reflective Mach-Zehnder interferometer with a 3 × 3 directional coupler
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Passive aligned assembly of an integrated optical displacement sensor based on a reflective Mach-Zehnder interferometer with a 3 × 3 directional coupler

机译：基于带3×3定向耦合器的反射式Mach-Zehnder干涉仪的集成光学位移传感器的无源对准组件

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摘要

An integrated optical displacement sensor based on a reflective Mach-Zehnder interferometer (MZI) was developed. The sensor features a low-loss autocollimation measurement head fabricated using a 62.5-^m gradient index fiber as lens, which separates the incoming and reflected light. The mounting of the lenses and the fiber coupling were performed using a passive alignment assembly technology. Using a 3 x 3 directional coupler (DC), the direction of the phase shift can be resolved. The measurement head exhibits low losses compared to a conventional DC to separate the reflected light. A measurement range of 225 μm could be achieved in good agreement with the expected 230 μm. The results show a good agreement between simulation and measurements. Using basic measurement electronics, movements of 2 nm can be resolved, while a resolution of <1 nm is expected using optimized measurement equipment.
机译：开发了基于反射式马赫曾德尔干涉仪（MZI）的集成光学位移传感器。该传感器具有一个低损耗自动准直测量头，该探头使用62.5-μm梯度折射率光纤作为透镜制造，用于分离入射光和反射光。透镜的安装和光纤耦合是使用被动对准组装技术进行的。使用3 x 3定向耦合器（DC），可以确定相移的方向。与分离反射光的常规DC相比，测量头损耗低。可以实现225μm的测量范围，与预期的230μm高度吻合。结果表明仿真和测量之间有很好的一致性。使用基本的测量电子设备，可以解决2 nm的移动，而使用优化的测量设备，则可以实现<1 nm的分辨率。

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