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首页> 外文期刊>Optical engineering >Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision
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Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision

机译：具有增强的信噪比和光学细分功能的二维基于对角线的外差光栅干涉仪

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摘要

A diagonal-based heterodyne grating interferometer (HGI) for two-dimensional displacement measurement is presented. It can simultaneously realize the high signal contrast and signal-to-noise ratio (SNR) with the specially designed cross grating. Meanwhile, an eightfold optical subdivision can be acquired with the proposed phase decoupling method. The signal contrast of 96.55% and SNR of 50 dB are obtained with laser power of 0.45 mW. Several tests including linear displacement, planar displacement, and stability are conducted in the experiments. The theoretical resolution of 0.125 nm, the short-range repeatability of 2.35 and 3.24 nm under round-trip movement of 10 μm, and the system stability better than ±4 and ±6 nm over 10 min are achieved for the X- and Y-directions, respectively. In addition, the measurement errors including geometric, nonlinear, and noncommon-path errors are analyzed. The results demonstrate that the proposed diagonal-based configuration combined with cross gratings is extremely suitable for HGIs, which has the potential to simultaneously improve the performance and practicability of HGIS.
机译：提出了一种用于二维位移测量的基于对角线的外差光栅干涉仪（HGI）。特殊设计的交叉光栅可以同时实现高信号对比度和信噪比（SNR）。同时，利用所提出的相位解耦方法可以获得八倍的光学细分。使用0.45 mW的激光功率可获得96.55％的信号对比度和50 dB的SNR。实验中进行了包括线性位移，平面位移和稳定性在内的几种测试。 X和Y-的理论分辨率为0.125 nm，在往返运动10μm下的短程重复性为2.35和3.24 nm，在10分钟内的系统稳定性优于±4和±6 nm。方向。此外，还分析了包括几何，非线性和非公共路径误差在内的测量误差。结果表明，所提出的基于对角线的配置与交叉光栅相结合非常适用于HGI，具有同时提高HGIS的性能和实用性的潜力。

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  • 来源
    《Optical engineering》 |2018年第6期|064102.1-064102.8|共8页
  • 作者

    Cunbao Lin; Shuhua Yan; Dan Ding; Guochao Wang;

  • 作者单位

    Space Engineering University, Department of Electronic and Optical Engineering, Beijing, China,National University of Defense Technology, College of Artificial Intelligence, Changsha, China;

    National University of Defense Technology, College of Artificial Intelligence, Changsha, China;

    Space Engineering University, Department of Electronic and Optical Engineering, Beijing, China;

    High-Tech Institution of Xi'an, Xi'an, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    heterodyne grating interferometer; cross grating; diagonal diffraction orders; signal-to-noise ratio; optical subdivision;

    机译：外差光栅干涉仪;交叉光栅对角衍射级;信噪比;光学细分;

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