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Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning

机译：基于电容式位移传感器的单点金刚石车削非接触式机上测量系统

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摘要

On-machine measurements can improve the form accuracy of optical surfaces in single-point diamond turning applications; however, commercially available linear variable differential transformer sensors are inaccurate and can potentially scratch the surface. We present an on-machine measurement system based on capacitive displacement sensors for high-precision optical surfaces. In the proposed system, a position-trigger method of measurement was developed to ensure strict correspondence between the measurement points and the measurement data with no intervening time-delay. In addition, a double-sensor measurement was proposed to reduce the electric signal noise during spindle rotation. Using the proposed system, the repeatability of 80-nm peak-to-valley (PV) and 8-nm root-mean-square (RMS) was achieved through analyzing four successive measurement results. The accuracy of 109-nm PV and 14-nm RMS was obtained by comparing with the interferometer measurement result. An aluminum spherical mirror with a diameter of 300 mm was fabricated, and the resulting measured form error after one compensation cut was decreased to 254 nm in PV and 52 nm in RMS. These results confirm that the measurements of the surface form errors were successfully used to modify the cutting tool path during the compensation cut, thereby ensuring that the diamond turning process was more deterministic. In addition, the results show that the noise level was significantly reduced with the reference sensor even under a high rotational Speed.
机译：机上测量可以提高单点金刚石车削应用中光学表面的形状精度；但是，市售的线性可变差动变压器传感器不准确，并且可能划伤表面。我们提出了一种基于电容式位移传感器的机上测量系统，用于高精度光学表面。在所提出的系统中，开发了一种位置触发测量方法，以确保测量点与测量数据之间的严格对应关系，而没有中间时间延迟。另外，提出了一种双传感器测量以减少主轴旋转过程中的电信号噪声。通过使用所提出的系统，通过分析四个连续的测量结果，可实现80 nm峰谷（PV）和8 nm均方根（RMS）的可重复性。通过与干涉仪的测量结果进行比较，获得了109 nm PV和14 nm RMS的精度。制作了直径为300 mm的铝球面镜，一次补偿切割后所得的测量形状误差在PV下减小到254 nm，在RMS下减小到52 nm。这些结果证实了表面形状误差的测量已成功用于补偿切削过程中的切削刀具路径修改，从而确保了金刚石车削过程更具确定性。此外，结果表明，即使在高转速下，参考传感器也能显着降低噪声水平。

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  • 来源
    《Optical engineering》 |2018年第4期|044105.1-044105.11|共11页
  • 作者

    Xingchang Li; Zhiyu Zhang; Haifei Hu; Yingjie Li; Ling Xiong; Xuejun Zhang; Jiwang Yan;

  • 作者单位

    Chinese Academy of Sciences, Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin, China,University of Chinese Academy of Sciences, Beijing, China;

    Chinese Academy of Sciences, Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin, China;

    Chinese Academy of Sciences, Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin, China,Jilin University, School of Mechanical Science and Engineering, Changchun, Jilin, China;

    Chinese Academy of Sciences, Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin, China;

    Chinese Academy of Sciences, Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin, China;

    Chinese Academy of Sciences, Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin, China;

    Keio University, Department of Mechanical Engineering, Yokohama, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    single-point diamond turning; capacitive displacement sensor; noncontact measurement; high efficiency; compensation;

    机译：单点金刚石车削;电容位移传感器非接触式测量;高效率;补偿金;

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