Wavefront-aberration measurement and systematic-error analysis of a high numerical-aperture objective

著录项

• 来源
  《Optical engineering》 |2018年第2期|024107.1-024107.9|共9页
• 作者

  Zhixiang Liu; Tingwen Xing; Yadong Jiang; Baobin Lv;

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• 作者单位

  Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China,University of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, Chengdu, China,University of Chinese Academy of Sciences, Beijing, China;

  Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China;

  University of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, Chengdu, China;

  Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China,University of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, Chengdu, China,University of Chinese Academy of Sciences, Beijing, China;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  chessboard grating; grating alignment; shearing interferometer; wavefront metrology;

  机译：棋盘格光栅对准剪切干涉仪波前计量;