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Quasicommon-path digital holographic microscopy with phase aberration compensation based on a long-working distance objective

机译:基于长距离物镜的带相差补偿的准共路径数字全息显微镜

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摘要

We present a quasicommon-path digital holographic microscopy with phase aberration compensation, which is based on a long-working distance objective and can be used for the quantitative characterization of microstructure specimens. The quasicommon-path arrangement makes the holographic system very compact and stable. Meanwhile, the object and reference beams all travel along the same path, which can effectively eliminate the system aberration, and the mirror in the reference arm can be adjusted precisely for the phase tilt compensation. In the experiment, a wafer with orderly patterns and unified height of 180 nm is measured, and its three-dimensional surface topography is obtained. A long-term system stability of 1.39 nm is achieved in measurement with the proposed method.
机译:我们提出了一种具有相差补偿的准共路径数字全息显微镜,该显微镜基于长工作距离物镜,可用于微观结构标本的定量表征。准公共路径布置使全息系统非常紧凑和稳定。同时,物镜和参考光束都沿同一路径传播,可以有效消除系统像差,并且可以精确调整参考臂中的反射镜以进行相位倾斜补偿。在实验中,测量具有规则图案且统一高度为180 nm的晶片,并获得其三维表面形貌。用所提出的方法在测量中获得了1.39 nm的长期系统稳定性。

著录项

  • 来源
    《Optical engineering》 |2018年第2期|024108.1-024108.6|共6页
  • 作者单位

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

    Ngee Ann Polytechnic, Singapore, Singapore;

    Northwestern Polytechnical University, School of Science, MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, and Shaanxi Key Laboratory of Optical Information Technology, Xi'an, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    digital holographic microscopy; quasicommon-path configuration; aberration compensation; phase measurement;

    机译:数字全息显微镜;准公共路径配置;像差补偿;相位测量;

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