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首页> 外文期刊>Optical engineering >Improved light extraction efficiency of complementary metal-oxide semiconductor hot carrier lights sources with the use of improved back-end-of-line light directing structures
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Improved light extraction efficiency of complementary metal-oxide semiconductor hot carrier lights sources with the use of improved back-end-of-line light directing structures

机译：通过使用改进的后端光导结构，提高了互补金属氧化物半导体热载流子光源的光提取效率

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摘要

Previous research has shown that the use of back-end-of-line (BEOL) light directing structures with silicon hot carrier light sources in a complementary metal-oxide semiconductor results in improved light extraction efficiency. This work focuses on the design of an improved back-end-of-line structure for improving light extraction efficiency when using substrate-based silicon light emitters. With the use of FRED optical engineering ray-tracing software, it was found that a significant amount of generated light is lost at the material interfaces of the optical structure, including losses due to significant internal reflections. Therefore, an optimized optical structure was designed to reduce internal reflections at the base of the structure. Simulation results show a 33.6% improvement in light extraction efficiency over the previously designed parabolic optical structure, over the visible spectrum. The light sources were tested using a parameter analyzer, radiometer, spectrometer, and goniometer. It was calculated that the luminance exiting the optimized optical structure had a 55.66-factor improvement over the control structure and a 1.35-factor improvement over the parabolic structure. Furthermore, the optimized structure had a 1.38-factor improvement in light extraction efficiency over the parabolic structure. Overall, the improved designed pipe-like BEOL light directing structure helped to improve the device luminescence and light emission direction from the light source, which invariably increased the light extraction efficiency.
机译：先前的研究表明，在互补金属氧化物半导体中使用后端热线（BEOL）导光结构和硅热载流子光源可以提高光提取效率。这项工作的重点是设计一种改进的后端结构，以在使用基于衬底的硅发光体时提高光提取效率。通过使用FRED光学工程光线跟踪软件，发现在光学结构的材料界面上会损失大量生成的光，包括由于大量内部反射而造成的损失。因此，设计了优化的光学结构以减少结构底部的内部反射。仿真结果表明，在可见光谱范围内，光提取效率比先前设计的抛物线光学结构提高了33.6％。使用参数分析仪，辐射计，光谱仪和测角仪对光源进行了测试。据计算，离开优化光学结构的亮度比控制结构提高了55.66倍，而抛物线结构提高了1.35倍。此外，与抛物线形结构相比，优化结构的光提取效率提高了1.38倍。总体而言，经过改进设计的管状BEOL导光结构有助于改善器件的发光度和光源的发光方向，从而始终提高了光提取效率。

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