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Enhanced luminescence property of InGaN/GaN nanorod array light emitting diode

机译:InGaN / GaN纳米棒阵列发光二极管的增强的发光性能

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摘要

Three-dimensional (3-D) InGaN/GaN nanorod array light emitting diode (LED) (nanorod-LED) with fine periodicity has been successfully fabricated by the focused ion beam (FIB) etching technique. After FIB etching, the uniformity of nanorod array is 94.3%, manifesting that FIB can control the etch size and etch depth exactly. After KOH etching, nanorod array exhibits comparatively smooth sidewalls. Compared to planar LED, the microphotoluminescence integrated intensity of nanorod-LED is enhanced by 15.7%. Additionally, the finite difference time domain simulations demonstrate that more photons can be extracted by nanorod array and spread to the further reqion, which is mainly due to the reduction of transform from radiation pattern to modified guided modes. three-dimensional InGaN/GaN nanorod array light emitting diode; focused ion beam; FDTD simulation.
机译:通过聚焦离子束(FIB)刻蚀技术成功地制造出具有精细周期性的三维(3-D)InGaN / GaN纳米棒阵列发光二极管(nanorod-LED)。经过FIB刻蚀后,纳米棒阵列的均匀度为94.3%,这表明FIB可以精确控制刻蚀尺寸和刻蚀深度。在KOH蚀刻之后,纳米棒阵列表现出相对光滑的侧壁。与平面LED相比,纳米棒LED的微光致发光集成强度提高了15.7%。此外,时域有限差分仿真表明,纳米棒阵列可以提取更多的光子,并将其传播到其他区域,这主要是由于从辐射方向图到修正的引导方式的转换减少。三维InGaN / GaN纳米棒阵列发光二极管;聚焦离子束FDTD模拟。

著录项

  • 来源
    《Optical engineering》 |2019年第4期|045102.1-045102.5|共5页
  • 作者单位

    Taiyuan University of Technology, Ministry of Education, Key Laboratory of Interface Science and Engineering in Advanced Materials, Taiyuan, China,Taiyuan University of Technology, Research Center of Advanced Materials Science and Technology, Taiyuan, China ,Shaanxi University of Science and Technology, Institute of Atomic and Molecular Science, Xi'an, China;

    Taiyuan University of Technology, MicroNano System Research Center, Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education & College of Information Engineering, Jinzhong, China;

    Taiyuan University of Technology, Ministry of Education, Key Laboratory of Interface Science and Engineering in Advanced Materials, Taiyuan, China,Taiyuan University of Technology, Research Center of Advanced Materials Science and Technology, Taiyuan, China;

    Shaanxi University of Science and Technology, Institute of Atomic and Molecular Science, Xi'an, China;

    Taiyuan University of Technology, Ministry of Education, Key Laboratory of Interface Science and Engineering in Advanced Materials, Taiyuan, China,Taiyuan University of Technology, Research Center of Advanced Materials Science and Technology, Taiyuan, China;

    Shaanxi University of Science and Technology, Institute of Atomic and Molecular Science, Xi'an, China;

    Shaanxi University of Science and Technology, Institute of Atomic and Molecular Science, Xi'an, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
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