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首页> 外文期刊>Optical engineering >Development of high volume fraction SiC_P/AI composite-bismuthate glass metal plus dielectric films optics Au-mirror
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Development of high volume fraction SiC_P/AI composite-bismuthate glass metal plus dielectric films optics Au-mirror

机译：高容量馏分SiC_P / AI复合铋玻璃金属加介电薄膜光学Au镜

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摘要

This paper reports the development of high volume fraction SiC_P/AI composite-bismuthate glass multilayer films optics Au-mirror with high reflectivity in a wavelength range of 760 to 1000 nm. Multilayer films were fabricated using an radio frequency-magnetron sputtering deposition system. The measured reflectivity of Ta_20_5/SiO_2/Au/Cr metal plus dielectric films optics Au-mirror could reach up to >97%. Then, on the basis of experiments, a Ф75-mm high volume fraction SiC_P/Al composite-bismuthate glass multilayer optical Au-mirror for a wavelength range of 760 to 1000 nm was manufactured. The tested results indicate that a peak-to-valley value of 0.854λ (λ = 632.8 nm) was achieved on the Au-mirror surface, and the slope deviation error for the flat surface was lower than 0.153,1 root mean square. The surface roughness of Ta_20_5/SiO_2/Au/Cr multilayer thin films was 1.30 nm (Ra).
机译：本文报告了高体积馏分SiC_P / AI复合铋玻璃多层薄膜光学Au-镜的开发，具有高760至1000nm的高反射率。使用射频 - 磁控溅射沉积系统制造多层膜。 Ta_20_5 / SiO_2 / AU / Cr金属加介电薄膜光学Au-镜的测量反射率可以达到高达> 97％。然后，在实验的基础上，制造了760至1000nm波长范围的Ф75mm高容积馏分SiC_p / Al复合铋玻璃多层光学镜镜。测试结果表明，在Au镜表面上实现了0.854λ（λ= 632.8nm）的峰值谷值，平面的斜率偏差误差低于0.153,1根均方。 TA_20_5 / SIO_2 / AU / CR多层薄膜的表面粗糙度为1.30nm（Ra）。

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  • 来源
    《Optical engineering》 |2017年第1期|015103.1-015103.6|共6页
  • 作者

    Bin Wang; Shengguan Qu; Xiang-Long Li;

  • 作者单位

    South China University of Technology National Engineering Research Center of Near-Net-Shape Forming for Metallic Materials Wushan Road 381 # Tianhe District Guangzhou 510640 China;

    South China University of Technology National Engineering Research Center of Near-Net-Shape Forming for Metallic Materials Wushan Road 381 # Tianhe District Guangzhou 510640 China;

    South China University of Technology State Key Laboratory of Luminescent Materials and Devices Institute of Polymer Optoelectronic Materials and Devices Wushan Road 381 # Tianhe District Guangzhou 510640 China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    high volume fraction; SiC_P/AI composite-bismuthate glass; Ta_2O_5/SiO_2/Au/Cr multilayer thin films; high reflectivity; low surface roughness;

    机译：高容量分数;SIC_P / AI复合 - 铋玻璃;TA_2O_5 / SIO_2 / AU / CR多层薄膜;高反射率;表面粗糙度低;

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