Calibration of a parametric model of an optical microscope

Yu Zhou; Bradley J. Nelson

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Calibration of a parametric model of an optical microscope

机译：光学显微镜参数模型的校准

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摘要

In micro-domain applications, such as assembly of hybrid mi- croelectromechanical systems, optical microscopes form a critical com- ponent of visually based microassembly systems. In order to effectively use vision feedback to guide manipulation strategies using a broad range of optical microscope configurations, accurately calibrated para- metric models of optical microscopes are required. Although many cali- bration techniques exist for macroscopic camera-lens systems, there is a dearth of literature on calibration of parametric microscope models.

机译：在微领域的应用中，例如混合微机电系统的组装，光学显微镜构成了基于视觉的微型组装系统的重要组成部分。为了有效地利用视觉反馈来指导使用各种光学显微镜配置的操纵策略，需要精确校准的光学显微镜参数模型。尽管对于宏观相机镜头系统存在许多校准技术，但有关参数显微镜模型校准的文献很少。

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《Optical engineering》 |1999年第12期|p.1989-1995|共7页
作者
Yu Zhou; Bradley J. Nelson;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类光学仪器;
关键词
camera calibration; image processing; optical microscope calibra- tion;

机译：相机校准;图像处理;光学显微镜校准;

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3. Submicrometer infrared surface imaging using a scanning-probe microscope and an optical parametric oscillator laser [J] . Graeme A. Hill James H. Rice Stephen R. Meech Duncan Q. M. Craig Paulina Kuo Konstantin Vodopyanov and Michael Reading Optics Letters . 2009,第4期

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4. Local array calibration using parametric modeling of position errors and a sparse calibration grid [C] . IEEE/SP Workshop on Statistical Signal Processing . 2009

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5. Genetic algorithm-based combinatorial parametric optimization for the calibration of traffic microscopic simulation models. [D] . Ma, Tao. 2001

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6. Design of Industrial Standards for the Calibration of Optical Microscopes [O] . Alberto Mínguez Martínez, Cecilia Gómez Pérez, David Canteli Pérez-Caballero, 2021

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7. Adaptive position calibration technique for an optical micro-scanning thermal microscope imaging system [O] . BoZhi Zhang, MeiJing Gao, Paul L. Rosin, 2020

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8. Standard Reference Materials: Antireflecting-Chromium Linewidth Standard, SRM473, for Calibration of Optical Microscope Linewidth Measuring Systems [R] . Potzick, J. E. 1997

机译：标准参考材料：抗反射 - 铬线宽标准sRm473，用于校准光学显微镜线宽测量系统

Calibration of a parametric model of an optical microscope

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