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Wide-range, high-accuracy, white light piston sensor for segmented optics

机译：适用于分段光学元件的宽范围，高精度白光活塞传感器

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摘要

Optical systems with segmented mirrors require precision coalignment of their segments to attain the desired performance. A novel sensor for measuring piston over a ± 10 wave range by analyzing the image of a white light point source is described. The sensor combines a Young's two-slit aperture pair for coarse sensing with another set of apertures, which include a phase retardation portion for fine sensing. The course sensor has an accuracy of ± 0.25 wave over the full range. The fine sensor works within ± 0.5 wave of zero with ± 0.005 wave accuracy, and a repeatability of the order of ± 0.001 wave. Theoretical derivation and experimental results are provided.
机译：具有分段镜的光学系统需要对其分段进行精确的共对准才能获得所需的性能。描述了一种新颖的传感器，该传感器通过分析白光点光源的图像在±10波范围内测量活塞。该传感器将用于粗略感测的杨氏两缝隙孔径对与另一组孔径相结合，后者包括用于精细感测的相位延迟部分。航向传感器在整个范围内的精度为±0.25波。精细传感器的工作范围为零的±0.5波，精度为±0.005波，重复精度为±0.001波。提供理论推导和实验结果。

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