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Uniaxial three-dimensional shape measurement with multioperation modes for different modulation algorithms

机译：用于不同调制算法的具有多操作模式的单轴三维形状测量

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摘要

A uniaxial three-dimensional shape measurement system with multioperation modes for different modulation algorithms is proposed. To provide a general measurement platform that satisfies the specific meas-urement requirements in different application scenarios, a measuring system with multioperation modes based on modulation measuring profilometry (MMP) is presented. Unlike the previous solutions, vertical scanning by focusing control of an electronic focus (EF) lens is implemented. The projection of a grating pattern is based on a digital micromirror device, which means fast phase-shifting with high precision. A field programmable gate array-based master control center board acts as the coordinator of the MMP system; it harmonizes the workflows, such as grating projection, focusing control of the EF lens, and fringe pattern capture. Fourier transform, phase-shift-ing technique, and temporary Fourier transform are used for modulation analysis in different operation modes. The proposed system features focusing control, speed, programmability, compactness, and availability. This paper details the principle of MMP for multioperation modes and the design of the proposed system. The per-formances of different operation modes are analyzed and compared, and a work piece with steep holes is mea-sured to verify this multimode MMP system.
机译：针对不同的调制算法，提出了一种具有多操作模式的单轴三维形状测量系统。为了提供满足不同应用场景中特定测量要求的通用测量平台，提出了一种基于调制测量轮廓图（MMP）的具有多操作模式的测量系统。与以前的解决方案不同，通过电子聚焦（EF）透镜的聚焦控制实现了垂直扫描。光栅图案的投影基于数字微镜设备，这意味着可以实现高精度的快速相移。基于现场可编程门阵列的主控中心板充当MMP系统的协调器。它可以协调工作流程，例如光栅投影，EF镜头的聚焦控制和条纹图案捕获。傅里叶变换，相移技术和临时傅里叶变换用于不同操作模式下的调制分析。拟议的系统具有聚焦控制，速度，可编程性，紧凑性和可用性的特点。本文详细介绍了多操作模式下MMP的原理以及所提出系统的设计。分析并比较了不同操作模式的性能，并测量了带有陡孔的工件，以验证该多模式MMP系统。

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