Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale

著录项

• 来源
  《Optical engineering》 |2017年第6期|064103.1-064103.9|共9页
• 作者

  Michihata Masaki; Ueda Shinichi; Takahashi Satoru; Takamasu Kiyoshi; Takaya Yasuhiro;

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• 作者单位

  University of Tokyo, Research Center for Advanced Science and Technology, Meguro, Tokyo, Japan;

  Osaka University, Department of Mechanical Engineering, Suita, Osaka, Japan;

  University of Tokyo, Research Center for Advanced Science and Technology, Meguro, Tokyo, Japan;

  University of Tokyo, Department of Precision Engineering, Bunkyo, Tokyo, Japan;

  Osaka University, Department of Mechanical Engineering, Suita, Osaka, Japan;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  dimensional measurement; interferometry; laser trapping; scanning measurement; standing wave;

  机译：尺寸测量;干涉测量激光陷波扫描测量驻波;