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Sparse subaperture stitching method for measuring large aperture planar optics

机译：测量大孔径平面光学器件的稀疏子孔径拼接方法

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摘要

Ring polishing is a primary method to polish large aperture planar optics that is widely used in the fabrication of high-power solid-state laser equipment. The relative motion track with the ring polishing is always rotationally symmetrical and the amount of material removal is related to the radius. The height errors are identical when the points are in the same radius, which can largely reduce the coverage area when the subaperture stitching method is used to measure the figure error of the surface. A new sparse lattice for planar optics polished by ring polishing is introduced. The cumulative error is proven small enough for sparse subaperture stitching by the reference of the simulated data. A planar optical element with 200 mm × 200 mm aperture was chosen to test the feasibility of our proposed method. The results indicate that sparse stitching is suitable for measuring a large planar surface polished by ring polishing. The results of two chain lattice are closer to the fully covered lattice than a one chain lattice. However, more measuring time could be saved by the one chain lattice method. So, the usage of different lattices could be adapted for different periods of large aperture planar optical manufacturing.
机译：环形抛光是抛光大孔径平面光学器件的主要方法，广泛用于制造高功率固态激光设备。带有环形抛光的相对运动轨迹始终是旋转对称的，并且材料去除量与半径有关。当这些点在相同的半径中时，高度误差是相同的，这在使用子孔径拼接方法测量表面的图形误差时可以大大减小覆盖面积。引入了一种新的稀疏晶格，用于通过环形抛光抛光的平面光学器件。通过参考模拟数据，证明累积误差足够小以进行稀疏子孔径拼接。选择具有200 mm×200 mm孔径的平面光学元件来测试我们提出的方法的可行性。结果表明，稀疏缝合适合于测量通过环形抛光而抛光的大平面。两个链格的结果比一个链格的结果更接近完全覆盖的格。但是，单链格子法可以节省更多的测量时间。因此，不同晶格的使用可以适应大孔径平面光学制造的不同时期。

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  • 来源
    《Optical engineering》 |2016年第2期|024103.1-024103.7|共7页
  • 作者

    Xudong Xu; Zhengxiang Shen; Guangde Tong; Zhanshan Wang;

  • 作者单位

    Tongji University, Key Laboratory of Advanced Microstructured Materials, Ministry of Education, Shanghai 200092, China,Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai 200092, China;

    Tongji University, Key Laboratory of Advanced Microstructured Materials, Ministry of Education, Shanghai 200092, China,Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai 200092, China;

    Tongji University, Key Laboratory of Advanced Microstructured Materials, Ministry of Education, Shanghai 200092, China,Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai 200092, China;

    Tongji University, Key Laboratory of Advanced Microstructured Materials, Ministry of Education, Shanghai 200092, China,Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai 200092, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    large aperture planar optical elements; ring polishing; sparse subaperture stitching; cumulative error;

    机译：大孔径平面光学元件;环形抛光;孔口稀疏缝合;累积误差;

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