...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Optical engineering >Dual-arm multiple-reflection Michelson interferometer for large multiple reflections and increased sensitivity
【24h】

Dual-arm multiple-reflection Michelson interferometer for large multiple reflections and increased sensitivity

机译：双臂多重反射迈克尔逊干涉仪，可产生较大的多重反射并提高灵敏度

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Michelson interferometer is one of the most popular optical interferometric systems used in optical metrology. Typically, Michelson interferometers are used to measure object displacement with wavefront shapes to one half of the laser wavelength. As testing components and device sizes reduce to micro and nano size, a sensitivity of half the wavelength of light cannot be used to measure several hundred picometer displacement. Multiple-reflection interferometers have been proposed and are used to increase the sensitivity in a Michelson interferometer; however, when altering the number of reflections, the system alignment becomes cumbersome. We describe some of the problems associated with the current multiple-reflection interferometer and introduce a setup for matching path lengths to increase the resolution and allow for the reduction of the stringent requirement on the coherence length of the lasers used. Theoretically, we show that more than 1000 reflections can be achieved. Experimental results of up to 100 reflections are presented in this paper.
机译：迈克尔逊干涉仪是光学计量学中最流行的光学干涉系统之一。通常，迈克尔逊干涉仪用于测量波前形状至激光波长一半的物体位移。随着测试组件和设备尺寸缩小到微米和纳米尺寸，光波长的一半的灵敏度无法用于测量数百皮米的位移。已经提出了多反射干涉仪，并用于提高迈克尔逊干涉仪的灵敏度。然而，当改变反射次数时，系统对准变得麻烦。我们描述了与当前的多反射干涉仪相关的一些问题，并介绍了一种用于匹配路径长度的设置，以提高分辨率并减少对所用激光器的相干长度的严格要求。从理论上讲，我们表明可以实现1000多次反射。本文介绍了多达100个反射的实验结果。

著录项

  • 来源
    《Optical engineering》 |2016年第2期|024101.1-024101.8|共8页
  • 作者

    Charles Joenathan; Ashley Bernal; Youn Woonghee; Robert M. Bunch; Christopher Hakoda;

  • 作者单位

    Rose-Hulman Institute of Technology, Department of Physics and Optical Engineering, 5500 Wabash Avenue, Terre Haute, Indiana 47803, United States;

    Rose-Hulman Institute of Technology, Department of Mechanical Engineering, 5500 Wabash Avenue, Terre Haute, Indiana 47803, United States;

    Rose-Hulman Institute of Technology, Department of Physics and Optical Engineering, 5500 Wabash Avenue, Terre Haute, Indiana 47803, United States;

    Rose-Hulman Institute of Technology, Department of Physics and Optical Engineering, 5500 Wabash Avenue, Terre Haute, Indiana 47803, United States;

    Pennsylvania State University, Department of Engineering Science and Mechanics, 201 Old Main, University Park, Pennsylvania 16802, United States;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    interferometry; multiple reflections;

    机译：干涉测量多重思考;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号