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Reconstruction of planar periodic structures based on Fourier analysis of moire patterns

机译：基于莫尔条纹的傅立叶分析重建平面周期结构

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摘要

In recent years, inverse moire methods have been developed to reconstruct microano-scale planar periodic structures with a larger field of view than those constructed using conventional methods. In these methods, moire fringes generated by superposition of the periodic structure and a reference grating are analyzed to reconstruct the periodic structure. There are two approaches to inverse moire methods: the fringe-centerlines method and the phase-shifting method. The former has lower accuracy and is difficult to automate, while the latter requires at least three moire images with complicated processing. A reconstruction method for planar periodic structures using Fourier analysis is proposed. This method can be used to characterize the microano periodic structure from a single microscope moire pattern. At the same time, when combined with a linewidth characterization method, the period and linewidth of the microstructure can be obtained simultaneously. As practical examples, the period and linewidth of a scanning electron microscopy raster are calibrated. Then the micro-structures of a micro-electroformed grating and a butterfly wing are reconstructed using the calibrated system. The proposed method provides a tool for the characterization of large area microano periodic structures. Further, this is a promising approach to detect defects in periodic structures.%microano periodic structure;characterization;inverse moire method;Fourier analysis;open ratio
机译：近年来，逆波纹方法已经被开发来重建比使用常规方法构造的那些更大的视野的微/纳米级平面周期性结构。在这些方法中，分析了由周期性结构和参考光栅的叠加产生的莫尔条纹，以重构周期性结构。逆波纹法有两种方法：条纹中心线法和相移法。前者精度较低且难以自动化，而后者则需要至少三个波纹图像，且处理复杂。提出了一种基于傅里叶分析的平面周期结构重建方法。此方法可用于从单个显微镜莫尔条纹图案表征微/纳米周期性结构。同时，结合线宽表征方法，可以同时获得微结构的周期和线宽。作为实际示例，对扫描电子显微镜光栅的周期和线宽进行了校准。然后，使用校准系统重建微电铸光栅和蝶形翼的微结​​构。所提出的方法提供了用于表征大面积微/纳米周期性结构的工具。此外，这是一种检测周期性结构缺陷的有前途的方法。％微米/纳米周期性结构;表征;逆莫尔条纹法;傅里叶分析;开孔率

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  • 来源
    《Optical engineering》 |2015年第4期|92-100|共9页
  • 作者

    Ronghua Zhu; Huimin Xie; Minjin Tang; Chuanwei Li; Dan Wu;

  • 作者单位

    Tsinghua University, Department of Engineering Mechanics, Key laboratory for Applied Mechanics of Ministrator of Education, Beijing 100084, China;

    Tsinghua University, Department of Engineering Mechanics, Key laboratory for Applied Mechanics of Ministrator of Education, Beijing 100084, China;

    Tsinghua University, Department of Engineering Mechanics, Key laboratory for Applied Mechanics of Ministrator of Education, Beijing 100084, China;

    Tsinghua University, Department of Engineering Mechanics, Key laboratory for Applied Mechanics of Ministrator of Education, Beijing 100084, China;

    Tsinghua University, Department of Engineering Mechanics, Key laboratory for Applied Mechanics of Ministrator of Education, Beijing 100084, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    044102-1-044102-9;

    机译：044102-1-044102-9;

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