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Optimization stitching model for subaperture test of aspheric surfaces

机译：非球面亚孔径测试的优化拼接模型

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摘要

Annular subaperture stitching interferometry (ASSI) is increasingly used for precision metrology of aspheric surfaces. The stitching model is a critical factor for stitching algorithms in ASSI. An optimized stitching model is proposed, which describes the alignment errors of adjacent subapertures based on an off-axis model and wave aberration theory. To keep the stitching errors from transmitting and accumulating, a simultaneous optimization algorithm is presented. The residual difference of overlapped regions of adjacent subapertures is utilized to evaluate the stitching accuracy. Finally, the comparative numerical simulations and experiments are carried out. It shows that the optimized stitching model has a better performance and validity.
机译：环形子孔径拼接干涉术（ASSI）越来越多地用于非球面表面的精密计量。拼接模型是ASSI中拼接算法的关键因素。提出了一种优化的拼接模型，该模型基于离轴模型和波像差理论描述了相邻子孔的对准误差。为了防止拼接误差的传递和累积，提出了一种同时优化算法。利用相邻子孔的重叠区域的残留差来评估缝合精度。最后，进行了比较数值模拟和实验。结果表明，优化后的拼接模型具有较好的性能和有效性。

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  • 来源
    《Optical engineering》 |2014年第4期|044105.1-044105.8|共8页
  • 作者

    Yongfu Wen; Haobo Cheng;

  • 作者单位

    Beijing Institute of Technology, School of Optoelectronics, Beijing 100081, China;

    Beijing Institute of Technology, School of Optoelectronics, Beijing 100081, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    stitching interferometry; aspheric surface; subaperture;

    机译：拼接干涉仪非球面子孔径;

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