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首页> 外文期刊>Optical engineering >Three-dimensional step-height measurement using sinusoidal wavelength scanning interferometer with four-step phase-shift method
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Three-dimensional step-height measurement using sinusoidal wavelength scanning interferometer with four-step phase-shift method

机译：使用四步相移法的正弦波扫描干涉仪进行三维步长测量

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摘要

A sinusoidal wavelength scanning interferometer with the four-step phase-shift method is demonstrated for a three-dimensional profile measurement. The interference phase-shift signal generated by the sinusoidal wavelength scanning contains information about optical path difference covering a nm-μm scale structure. The interference phase-shift signal was obtained by the four-step phase-shifting method. The sinusoidal wavelength shifting with a frequency of approximately 180 Hz and tunable range of 5.7 nm was performed by the Littman-Metcalf external resonator-type tunable laser with a center of 772.1 nm. The full-field surface profile measurement was conducted by a charge coupled device image sensor with an accuracy on a nm scale. The surface profiles of gauge blocks with a step height up to about 10 μm were successfully measured with a surface profile irregularity of 3.8 × 10~(-2) μm. The deviations of two measured surfaces of upper and lower steps were estimated to be 1.6×10~(-2)μm and 3.1×10~(-2)μm, respectively.
机译：演示了采用四步相移法的正弦波波长扫描干涉仪进行三维轮廓测量的方法。由正弦波波长扫描生成的干涉相移信号包含有关覆盖nm-μm标度结构的光程差的信息。通过四步相移方法获得干涉相移信号。通过中心为772.1 nm的Littman-Metcalf外部谐振器型可调激光器，以大约180 Hz的频率和5.7 nm的可调范围进行正弦波波长偏移。通过电荷耦合器件图像传感器以纳米级的精度进行全场表面轮廓测量。成功地测量了台阶高度高达约10μm的量规块的表面轮廓，其表面轮廓不规则度为3.8×10〜（-2）μm。上下两个测量表面的偏差估计分别为1.6×10〜（-2）μm和3.1×10〜（-2）μm。

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