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Orientation identification of the power spectrum

机译:功率谱的方向识别

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The image Fourier transform is widely used for defocus and astigmatism correction in electron microscopy. The shape of a power spectrum (the square of a modulus of image Fourier transform) is directly related to the three microscope controls, namely, defocus and twofold (two-parameter) astigmatism. We propose a new method for power-spectrum orientation identification. The method is based on the three measures that are related to the microscope's controls. The measures are derived from the mathematical moments of the power spectrum and is tested with the help of a Gaussian benchmark, as well as with the scanning electron microscopy experimental images. The method can be used as an assisting tool for increasing the capabilities of defocus and astigmatism correction a of nonexperienced scanning electron microscopy user, as well as a basis for automated application.
机译:图像傅立叶变换被广泛用于电子显微镜中的散焦和像散校正。功率谱的形状(图像傅立叶变换的模的平方)与三个显微镜控制直接相关,即散焦和双重(两参数)像散。我们提出了一种新的功率谱方向识别方法。该方法基于与显微镜控件相关的三种测量。这些措施是从功率谱的数学矩得出的,并借助高斯基准以及扫描电子显微镜实验图像进行了测试。该方法可用作增加无经验的扫描电子显微镜用户的散焦和像散校正能力的辅助工具,以及自动应用的基础。

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