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首页> 外文期刊>Optical engineering >Calcium barium niobate ridge waveguide on silicon substrate
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Calcium barium niobate ridge waveguide on silicon substrate

机译：硅衬底上的铌酸钙钡脊形波导

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摘要

A novel optical ridge waveguide using calcium barium niobate (CBN) with a high electro-optic coefficient on silicon substrate is proposed for the design and realization of the next-generation hybrid modulators with short length and low driving voltage. To overcome the etching difficulty of CBN, the design of a waveguide, including an elevated CBN layer based on etched silicon dioxide, is presented. Fabrication of a thick 2.5-μm CBN layer is performed using pulsed laser deposition. Deposited silicon dioxide on the sides and top of the CBN reduces the waveguide loss as low as 3.44 dB/cm, measured using a cutback method. Good agreement between the mode profiles of the simulation and measurement is Obtained.
机译：提出了一种在硅衬底上使用具有高电光系数的铌酸钙钡（CBN）的新型光脊波导，以设计和实现长度短，驱动电压低的下一代混合调制器。为了克服CBN的蚀刻困难，提出了波导的设计，包括基于蚀刻的二氧化硅的升高的CBN层。使用脉冲激光沉积工艺来制造厚2.5μm的CBN层。使用缩减法测量，在CBN的侧面和顶部沉积的二氧化硅可将波导损耗降低至3.44 dB / cm。在仿真和测量的模式配置文件之间取得了良好的一致性。

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  • 来源
    《Optical engineering》 |2010年第7期|p.074601.1-074601.3|共3页
  • 作者

    Ebrahim Mortazy; Irina Stateikina; Amirhossein Tehranchi; Sebastien Delprat; Mohamed Chaker; Ke Wu;

  • 作者单位

    University of Montreal Ecole Polytechnique Poly-Grames and Centre for Radiofrequency Electronics Research Montreal, Quebec H3T 1J4 Canada;

    rnInstitut National de la Recherche Scientifique Energy, Materials and Telecommunications Varennes, Quebec J3X 1P7 Canada;

    rnUniversity of Montr44eal Ecole Polytechnique Poly-Grames and Centre for Radiofrequency Electronics Research Montreal, Quebec H3T 1J4 Canada;

    rnInstitut National de la Recherche Scientifique Energy, Materials and Telecommunications Varennes, Quebec J3X 1P7 Canada;

    rnInstitut National de la Recherche Scientifique Energy, Materials and Telecommunications Varennes, Quebec J3X 1P7 Canada;

    rnUniversity of Montreal Ecole Polytechnique Poly-Grames and Centre for Radiofrequency Electronics Research Montreal, Quebec H3T 1J4 Canada;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    mode profile; ridge waveguide; silicon substrate;

    机译：模式配置文件;脊形波导硅基板;

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