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首页> 外文期刊>Optical Materials >Fabrication and characterization of a dual layer multiple refractive index benzocyclobutene polymer platform for integrated optical devices
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Fabrication and characterization of a dual layer multiple refractive index benzocyclobutene polymer platform for integrated optical devices

机译:用于集成光学器件的双层多重折射率苯并环丁烯聚合物平台的制备和表征

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摘要

A dual layer Benzocyclobutene (BCB) polymer with tailored refractive index values is successfully fabricated using different curing processes, forming a platform for integrated optical devices. The dual layer BCB polymer could potentially solve the high index contrast issue associated with existing glass-polymer structure, which require sub-micron precision when producing single-mode waveguides. Although the two BCB layers display similar physical properties, they have significantly different optical and chemical characteristics. The different curing processes for the undercladding and core layers led to these differences. Single mode waveguides fabricated via photolithography were also demonstrated with an average propagation loss of 2 dB/cm.
机译:使用不同的固化工艺成功制造了具有定制折射率值的双层苯并环丁烯(BCB)聚合物,形成了集成光学器件的平台。双层BCB聚合物可以潜在地解决与现有玻璃-聚合物结构相关的高折射率对比度问题,在生产单模波导时,这种结构要求亚微米精度。尽管两个BCB层显示相似的物​​理特性,但它们具有明显不同的光学和化学特性。底层和芯层的不同固化过程导致了这些差异。还证明了通过光刻法制造的单模波导,其平均传播损耗为2 dB / cm。

著录项

  • 来源
    《Optical Materials》 |2012年第11期|p.1735-1741|共7页
  • 作者单位

    Department of Electronic Engineering University of Technology Mara 40450 Shah Alam Malaysia;

    Photonic Research Centre University of Malaya 50603 Kuala Lumpur Malaysia;

    Faculty of Engineering Multimedia University 63100 Cyberjaya Malaysia;

    Department of Chemistry University of Malaya 50603 Kuala Lumpur Malaysia;

    Department of Electrical Engineering University of Malaya 50603 Kuala Lumpur Malaysia Photonic Research Centre University of Malaya 50603 Kuala Lumpur Malaysia;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    BCB; multilayers; polymers; optical materials; heat treatment;

    机译:BCB;多层聚合物光学材料热处理;

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