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Studies of aluminum oxide thin films deposited by laser ablation technique

机译：激光烧蚀技术沉积氧化铝薄膜的研究

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This paper presents the structural and optical investigations of the aluminum oxide nanocrystalline thin films. Investigated films were fabricated by laser ablation technique in high vacuum onto quartz substrates. The films were deposited at two different temperatures of the substrates equal to room temperature and 900 K.X-ray Diffraction spectra proved nanocrystalline character and the corundum phase of the film regardless on the substrate temperature during the deposition process. Values of the refractive indices, extinction and absorption coefficients were calculated by using Transmission and Reflection Spectroscopy in the UV-VIS-NIR range of the wavelength. Coupling Prism Method was used for films thickness estimations. Experimental measurements and theoretical calculations of the Third Harmonic Generation were also reported. Obtained results show that the lattice strain may affect obtained values of the third order nonlinear optical susceptibility. (C) 2016 Elsevier B.V. All rights reserved.
机译：本文介绍了氧化铝纳米晶体薄膜的结构和光学研究。通过激光烧蚀技术在高真空下在石英衬底上制备研究膜。薄膜在等于室温和900 K的两个不同温度下在基底上沉积。X射线衍射光谱证明了薄膜的纳米晶特征和刚玉相，与沉积过程中的基底温度无关。通过使用透射和反射光谱法在波长的UV-VIS-NIR范围内计算折射率，消光系数和吸收系数的值。耦合棱镜法用于膜厚度估计。还报告了第三谐波产生的实验测量和理论计算。所得结果表明，晶格应变可能会影响获得的三阶非线性光学磁化率值。 （C）2016 Elsevier B.V.保留所有权利。

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