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Design and fabrication of electro-optic polymer modulators and switches

机译:电光聚合物调制器和开关的设计与制造

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摘要

Electro-optic (EO) polymers are interesting materials for realising active functions in integrated optics devices, since they can have relatively high EO coefficients and they can be easily combined or integrated with several (passive) materials. EO interaction can be exploited for obtaining modulation or switching in polymer-based devices using several principles (e.g. Mach--Zehnder, Digital Optical Switch or tuned coupling to surface plasmons), which have been investigated and tested using a number of different materials. We compare these principles in view of several aspects of practical importance: realistic values of EO coefficients and wavelength-dependent attenuation, optical, electrical and chemical compatibility of substrate, guiding and cladding layers, channel definition by etching (inverted) ridge wave- guides or by photo-bleaching, loca1 and global poling methods, polarisation-dependence, and the design of efficient high-bandwidth travelling wave electrodes. In most of the investigated devices, we employ a waveguiding structure based on silicon and its oxynitrides, exploiting the fact that the refractive index of silicon oxynitride can be accurately adjusted over a wide range by adjusting its composition. We will discuss the practical difficulties encountered and show the obtained results with phase- and intensity modulators and switches.
机译:电光(EO)聚合物是用于在集成光学设备中实现主动功能的有趣材料,因为它们可以具有相对较高的EO系数,并且可以轻松地与几种(无源)材料组合或集成。可以利用几种原理(例如Mach-Zehnder,数字光开关或调谐耦合到表面等离激元)来利用EO相互作用来获得基于聚合物的设备中的调制或切换,这些原理已经使用多种不同的材料进行了研究和测试。我们从几个实际意义的方面对这些原理进行了比较:EO系数的实际值和与波长有关的衰减,基板,导光层和包层的光学,电学和化学兼容性,通过蚀刻(反向)脊形波导管或通过光漂白,局部和全局极化方法,极化相关性以及有效的高带宽行波电极的设计来实现。在大多数研究的设备中,我们利用基于硅及其氧氮化物的波导结构,利用了可以通过调节其成分在很宽的范围内精确调节氧氮化硅的折射率的事实。我们将讨论遇到的实际困难,并展示使用相位和强度调制器和开关获得的结果。

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