...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Optics and Lasers in Engineering >Surface roughness characterization of Al-doped zinc oxide thin films using rapid optical measurement
【24h】

Surface roughness characterization of Al-doped zinc oxide thin films using rapid optical measurement

机译：快速光学测量表征掺铝氧化锌薄膜的表面粗糙度

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Transparent conductive oxide thin films have been widely investigated in photoelectric devices such as flat panel display (FPD) and solar cells. Al-doped zinc oxide (AZO) thin films have been widely employed in FPD. Measuring the surface roughness of AZO thin films is important before the manufacturing of photoelectric device using AZO thin films because surface roughness of AZO thin films will significantly affect the performance of photoelectric device. Traditional methods to measure surface roughness of AZO thin films are scanning electron microscopy and atomic force microscopy. The disadvantages of these approaches include long lead time and slow measurement speed. To solve this problem, an optical inspection system for rapid measurement of the surface roughness of AZO thin films is developed in this study. It is found that the incident angle of 60° is a good candidate to measure the surface roughness of AZO thin films. Based on the trend equation y = -3.6483x+2.1409, the surface roughness of AZO thin films (y) can be directly deduced from the peak power density (x) using the optical inspection system developed. The maximum measurement-error rate of the optical inspection system developed is less than 8.7%.The saving in inspection time of the surface roughness of AZO thin films is up to 83%.
机译：透明导电氧化物薄膜已在诸如平板显示器（FPD）和太阳能电池的光电装置中得到广泛研究。铝掺杂的氧化锌（AZO）薄膜已被广泛用于FPD。在使用AZO薄膜制造光电器件之前，测量AZO薄膜的表面粗糙度很重要，因为AZO薄膜的表面粗糙度将显着影响光电器件的性能。测量AZO薄膜表面粗糙度的传统方法是扫描电子显微镜和原子力显微镜。这些方法的缺点包括交货时间长和测量速度慢。为了解决这个问题，本研究开发了一种用于快速测量AZO薄膜表面粗糙度的光学检测系统。发现60°的入射角是测量AZO薄膜的表面粗糙度的良好选择。基于趋势方程y = -3.6483x + 2.1409，可以使用开发的光学检测系统直接从峰值功率密度（x）推导出AZO薄膜的表面粗糙度（y）。开发的光学检测系统最大测量误差率小于8.7％，AZO薄膜表面粗糙度检测时间节省达83％。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号