...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Optics and Lasers in Engineering >Fabrication of fluorinated polyimide optical waveguides by micropen direct writing technology
【24h】

Fabrication of fluorinated polyimide optical waveguides by micropen direct writing technology

机译：微笔直写技术制备氟化聚酰亚胺光波导

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A novel and cheap direct writing method based on the micropen has been developed to fabricate fluorinated polyimide stripe optical waveguides on Si/SiO_2 wafers. The overall design, starting material, micropen direct writing system and fabrication processes of the stripe optical waveguides are presented. The effects of the key direct writing parameters, such as the tip-to-substrate distance, extrusive gas pressure, writing speed and viscosity of the polyamic acid, on the dimension and morphology of the stripe optical waveguides are discussed in detail. After deposition by the micropen system and baking process, the fluorinated polyimide stripe optical waveguides with good morphology and surface quality can be fabricated using the optimal parameters. The propagation losses at the wavelength of 1.55 μm are in the range of 1.4-3.5 dB cm~(-1) as characterized by different length combinations of the strip optical waveguides.
机译：已经开发了一种基于微笔的新颖且廉价的直接写入方法，以在Si / SiO_2晶片上制造氟化聚酰亚胺条纹光波导。介绍了条形光波导的总体设计，起始材料，微型笔直接书写系统和制造工艺。详细讨论了关键的直接写入参数，例如针尖到基板的距离，挤出气体压力，聚酰胺酸的写入速度和粘度，对条形光波导的尺寸和形态的影响。通过微笔系统沉积并经过烘烤工艺后，可以使用最佳参数制造出具有良好形态和表面质量的氟化聚酰亚胺条纹光波导。以条形光波导的不同长度组合为特征，在1.55μm波长处的传播损耗在1.4-3.5dB cm-1（-1）的范围内。

著录项

  • 来源
    《Optics and Lasers in Engineering》 |2011年第7期|p.880-884|共5页
  • 作者

    Zemin Wang; Yu Cao; Xiangyou Li; Ming Gao; Xiaoyan Zeng;

  • 作者单位

    School of Optoelectronics Science and Technology, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;

    School of Optoelectronics Science and Technology, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;

    School of Optoelectronics Science and Technology, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;

    School of Optoelectronics Science and Technology, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;

    School of Optoelectronics Science and Technology, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    micropen; direct writing system; optical waveguide; propagation loss;

    机译：微型笔直写系统;光波导传播损耗;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号