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首页> 外文期刊>Optics and Lasers in Engineering >In-plane vibration characterization of microelectromechanical systems using acousto-optic modulated partially incoherent stroboscopic imaging
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In-plane vibration characterization of microelectromechanical systems using acousto-optic modulated partially incoherent stroboscopic imaging

机译：使用声光调制部分非相干频闪成像的微机电系统的面内振动表征

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摘要

A technique using acousto-optic modulated partially incoherent stroboscopic imaging for measurement of in-plane motion of microelectromechanical systems (MEMS) is presented. Vibration measurement is allowed by using flashes of the partially incoherent light source to freeze the positions of the microstructure at 12 equally spaced phases of the vibration period. The first-order diffracted beam taken out by an acousto-optic modulator (AOM) from the light beam of a laser is made partially incoherent by a rotating diffuser and then serves as the stroboscopic light source. Both the MEMS excitation signal and the flash control signal are provided by a dual-channel function generator. The main advantage of this measurement method is the absence of a stroboscopic generator and a high speed digital camera. Microscale prototypes are fabricated and tested. Quantitative estimates of the harmonic responses of the prototypes are obtained from the recorded images. The results agree with those obtained with a commercial MEMS motion analyzer™ with relative errors less than 2%.
机译：提出了一种使用声光调制的部分非相干频闪成像技术测量微机电系统（MEMS）平面内运动的技术。通过使用部分非相干光源的闪光将微结构的位置冻结在振动周期的12个相等间隔的相位上，可以进行振动测量。由声光调制器（AOM）从激光束中取出的一阶衍射光束通过旋转扩散器部分不相干，然后用作频闪光源。 MEMS激励信号和闪光控制信号均由双通道函数发生器提供。这种测量方法的主要优点是没有频闪发生器和高速数码相机。微型原型被制造和测试。从记录的图像中获得原型谐波响应的定量估计。结果与相对误差小于2％的商用MEMS运动分析仪™所获得的结果一致。

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  • 来源
    《Optics and Lasers in Engineering》 |2011年第7期|p.954-961|共8页
  • 作者

    Dung-An Wang; Fang-Wen Sheu; Yen-Sih Chiu;

  • 作者单位

    Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung 40227, Taiwan;

    Department of Electrophysics, National Chiayi University, Chiayi 60004, Taiwan;

    Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung 40227, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    in-plane vibration; microelectromechanical system; stroboscopic;

    机译：平面内振动;微机电系统频闪的;

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