Fabrication of microstructures in Foturan glass using infrared femtosecond laser pulses and chemical etching

C.W. Cheng; J.S. Chen; P.X. Lee; C.W. Chien

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Fabrication of microstructures in Foturan glass using infrared femtosecond laser pulses and chemical etching

机译：使用红外飞秒激光脉冲和化学蚀刻在Foturan玻璃中制备微结构

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In this study, a method for the fabrication of microstructures on the surface and inside Foturan glass by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an 8% HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). The results demonstrated that the etching time is an important parameter in the fabrication of microstructures on Foturan glass. An example of a tapered U-shaped microchannel with a minimized neck diameter of about 5 urn at the central point for cell detection is presented.

机译：在这项研究中，开发了一种通过飞秒激光诱导改性在Futuraan玻璃的表面和内部制造微结构的方法。对该技术进行热处理以使修改后的区域结晶，然后将样品置于8％HF酸溶液中进行化学蚀刻。使用扫描电子显微镜（SEM）观察所制造的微结构。结果表明，蚀刻时间是在Foturan玻璃上制备微结构的重要参数。呈现了锥形U形微通道的示例，该微通道在中心点的颈部最小直径约为5微米，用于细胞检测。

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来源
《Optics and Lasers in Engineering》 |2010年第8期|p.811-815|共5页
作者
C.W. Cheng; J.S. Chen; P.X. Lee; C.W. Chien;
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作者单位

ITRI South, Industrial Technology Research Institute, No. 8, Gongyan Road, Liujia Shiang, Tainan County 734, Taiwan, ROC;

Department of Mechanical Engineering, National Chung Cheng University, No. 168, University Road, Min-Hsiung, Chia-Yi 621, Taiwan, ROC;

Department of Mechanical Engineering, National Chung Cheng University, No. 168, University Road, Min-Hsiung, Chia-Yi 621, Taiwan, ROC;

ITRI South, Industrial Technology Research Institute, No. 8, Gongyan Road, Liujia Shiang, Tainan County 734, Taiwan, ROC;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
femtosecond laser; foturan glass; photosensitive glass;

机译：飞秒激光foturan玻璃;光敏玻璃;

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1. Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching [J] . Yuri Sikorski, Corneliu Rablau, Mark Dugan, Applied Optics . 2006,第28期

机译：飞秒激光脉冲和化学刻蚀在熔融石英玻璃中制造和表征具有光学质量表面的微结构
2. Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching [J] . Yuri Sikorski, Corneliu Rablau, Mark Dugan, Applied optics . 2006,第28期

机译：飞秒激光脉冲和化学刻蚀在熔融石英玻璃中制造和表征具有光学质量表面的微结构
3. Micro-hole Fabricated Inside Foturan Glass Using Femtosecond Laser Writing And Chemical Etching [J] . Yinzhong Wu, Wei Jia, Ching-yue Wang, Optical and quantum electronics . 2007,第14期

机译：飞秒激光刻蚀和化学蚀刻在Futuraan玻璃内制成微孔
4. Rapid fabrication of optical volume gratings embedded in Foturan glass with femtosecond laser pulses [C] . He, Fei, Cheng, Ya, Xu, Zhizhan, Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics;CLEO/PACIFIC RIM '09 . 2009

机译：飞秒激光脉冲快速制造嵌入Foturan玻璃的光学体积光栅
5. Surface studies and microstructure fabrication using femtosecond laser pulses. [D] . Younkin, Rebecca Jane. 2001

机译：使用飞秒激光脉冲进行表面研究和微结构制造。
6. Controllable high-throughput high-quality femtosecond laser-enhanced chemical etching by temporal pulse shaping based on electron density control [O] . Mengjiao Zhao, Jie Hu, Lan Jiang, -1

机译：基于电子密度控制的时间脉冲整形可控的高通量高质量飞秒激光增强化学刻蚀
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机译：使用飞秒激光脉冲和化学蚀刻制造高纵横比，微流体通道和隧道
8. Fabrication of Microstructures on Photosensitive Glass using a Femtosecond Laser Process and Chemical Etching [R] . Cheng, C. W., Chen, J. S., Lee, P. X., 2009

机译：利用飞秒激光工艺和化学蚀刻在光敏玻璃上制备微结构

Fabrication of microstructures in Foturan glass using infrared femtosecond laser pulses and chemical etching

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