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首页> 外文期刊>Optics and Lasers in Engineering >Optimal Ablation Of Fluorine-doped Tin Oxide (fto) Thin Film Layers Adopting A Simple Pulsed Nd:yag Laser With Tem_(00) Mode
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Optimal Ablation Of Fluorine-doped Tin Oxide (fto) Thin Film Layers Adopting A Simple Pulsed Nd:yag Laser With Tem_(00) Mode

机译:采用Tem_(00)模式的简单脉冲Nd:yag激光器对掺氟氧化锡(fto)薄膜层的最佳烧蚀

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摘要

In material processing, a laser system with optimal laser parameters has been considered to be significant. Especially, the laser ablation technology is thought to be very important for fabricating a dye-sensitized solar cell (DSSC) module with good quality. Moreover, the TEM_(00) mode laser beam is the most dominant factor to decide the incident photon to current conversion efficiency (IPCE) characteristics. In order to get the TEM_(00) mode, a pin-hole is inserted within a simple pulsed Nd:YAG laser resonator. And the spatial field distribution is measured by using three pin-hole diameters of 1.6, 2.0 and 4.0 mm, respectively. At that moment, each case has the same laser beam energy by adjusting the discharge voltage and pulse per second (pps). From those results, it is known that the pin-hole size of 1.6 mm has the perfect TEM_(00) mode. In addition, at the charging voltage of 1000 V, 10 pps, the feeding speed of 6.08 mm/s and the overlapping rate (OL) of 62%, the scanning electron microscope (SEM) photograph of fluorine-doped tin oxide (FTO) thin film layers shows the best ablation trace.
机译:在材料加工中,具有最佳激光参数的激光系统被认为是重要的。特别地,激光烧蚀技术被认为对于制造高质量的染料敏化太阳能电池(DSSC)模块非常重要。此外,TEM_(00)模式激光束是决定入射光子到电流转换效率(IPCE)特性的最主要因素。为了获得TEM_(00)模式,在简单的Nd:YAG脉冲激光谐振器中插入了一个针孔。并且通过分别使用三个1.6mm,2.0mm和4.0mm的针孔直径来测量空间场分布。此时,通过调整放电电压和每秒脉冲数(pps),每种情况下的激光束能量都相同。根据这些结果,可以知道1.6 mm的针孔尺寸具有理想的TEM_(00)模式。另外,在1000 V,10 pps的充电电压,6.08 mm / s的进给速度和62%的重叠率(OL)下,掺氟氧化锡(FTO)的扫描电子显微镜(SEM)照片薄膜层显示出最佳的烧蚀痕迹。

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