Dimensional Characterization Of Opaque Samples With A Ring Interferometer

E.N. Morel; J.R. Torga

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Dimensional Characterization Of Opaque Samples With A Ring Interferometer

机译：环形干涉仪对不透明样品的尺寸表征

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In the present work, we introduce an optical method to characterize opaque samples. The technique combines low coherence interferometry with a ring configuration. This set-up, let us to obtain the thickness of the sample and the topography of both faces simultaneously by measuring the optical path difference with a reference arm. Experimental results in metal gauge blocks up to 1 mm are shown. A resolution better than 5 μm was obtained.

机译：在目前的工作中，我们介绍了一种光学方法来表征不透明样品。该技术将低相干干涉测量技术与环形结构相结合。这种设置让我们通过用参考臂测量光程差来同时获得样品的厚度和两面的形貌。显示了在最大1 mm的金属量块中的实验结果。获得了优于5μm的分辨率。

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《Optics and Lasers in Engineering》 |2009年第5期|607-611|共5页
作者
E.N. Morel; J.R. Torga;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
interferometry; low coherence;

机译：干涉测量;低相干;

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Dimensional Characterization Of Opaque Samples With A Ring Interferometer

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