Stress reduction in planar waveguide using polymer top layer

Neha Sharma; V.K. Sharma; K.N. Tripathi

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Stress reduction in planar waveguide using polymer top layer

机译：使用聚合物顶层降低平面波导中的应力

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摘要

Planar optical waveguides consisting of layers from different materials created at elevated temperatures usually exhibit substantial stresses. By controlling the layer thickness of polymeric top layer on planar waveguide structures, it is possible to use very thin layers for stress compensation, significantly reducing required deposition times. It is possible to reduce birefringence within planar device by controlling top polymer layer thickness with thermal expansion coefficient greater than silica or PMMA.

机译：由在高温下产生的不同材料制成的层组成的平面光波导通常会表现出很大的应力。通过控制平面波导结构上聚合物顶层的层厚，可以使用非常薄的层进行应力补偿，从而大大减少了所需的沉积时间。通过控制热膨胀系数大于二氧化硅或PMMA的顶部聚合物层厚度，可以减少平面器件内的双折射。

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来源
《Optics and Lasers in Engineering》 |2008年第7期|p.514-516|共3页
作者
Neha Sharma; V.K. Sharma; K.N. Tripathi;
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作者单位

Department of Electronic Science, University of Delhi, South Campus, Benito Juarez Road, New Delhi 110021, India;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类光学;
关键词
stress; birefringence; planar waveguides; integrated optics;

机译：应力;双折射;平面波导;集成光学;

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1. Birefringence control in planar waveguides using doped top layers [J] . John Canning Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2001,第3a6期

机译：使用掺杂顶层的平面波导中的双折射控制
2. Shaping of flat-topped element patterns in a planar array of circular waveguides using a multilayered disk structure. II. Experimental study and comparison [J] . Soon Young Eom, Han Kyu Park, Sook Ik Jeon, IEEE Transactions on Antennas and Propagation . 2003,第5期

机译：使用多层盘结构在圆形波导的平面阵列中平顶元件图案的成形。二。实验研究与比较
3. Shaping of flat-topped element patterns in a planar array of circular waveguides using a multilayered disk structure. II. Experimental study and comparison [J] . Soon Young Eom, Han Kyu Park, Sook Ik Jeon, IEEE Transactions on Antennas and Propagation . 2003,第5期

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4. Optical-loss reduction and phase-matched second-harmonic generationin a four-layered polymeric waveguide [C] . Clays K., Schildkraut J.S., Williams D.J. Vehicular Technology Conference, 1998. VTC 98 . 1998

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5. Analysis of multi-layer arrow planar waveguide for evanescent field enhancement in low-index media. [D] . Abdul Majid, Mohammed. 2001

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7. Waveguide Raman Spectroscopy of Thin Polymer Layers and Monolayers of Biomolecules Using High Refractive Index Waveguides [O] . Johannes Sake Kanger, Cees Otto, Michiel Slotboom, 1996

机译：使用高折射率波导的薄聚合物层和二聚骨髓单层的波导拉曼光谱法

Stress reduction in planar waveguide using polymer top layer

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