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首页> 外文期刊>Optics and Lasers in Engineering >Rapid misalignment correction method in reflective fourier ptychographic microscopy for full field of view reconstruction
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Rapid misalignment correction method in reflective fourier ptychographic microscopy for full field of view reconstruction

机译:用于反射傅里叶PTYCHOGURCORCE的快速未对准校正方法,实现完整视野重建

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摘要

Fourier ptychographic microscopy (FPM) is a promising phase retrieval algorithm that does not need interferometry. Recently, reflective FPM has been highlighted as a measuring method for surface inspection in the industry, but using it is challenging because of the limited speed of the conventional misalignment correction methods. Here, we propose a new misalignment correction method to overcome this limitation by using additional 4f imaging and modifying the conventional misalignment method. As a result, about 1 mm(2) (8095 x 8095) wide field of view image was reconstructed within 980.3 s.
机译:傅里叶PTychographic显微镜(FPM)是不需要干涉测量的有前途的相位检索算法。最近,反射FPM被强调为行业表面检查的测量方法,但由于传统未对准校正方法的有限速度,使用它具有挑战性。在这里,我们提出了一种新的未对准校正方法,通过使用额外的4F成像并修改传统的未对准方法来克服这种限制。结果,在980.3秒内重建约1mm(2)(8095×8095)宽视野图像。

著录项

  • 来源
    《Optics and Lasers in Engineering》 |2021年第3期|106418.1-106418.6|共6页
  • 作者

    Lee H.; Chon B. H.; Ahn H. K.;

  • 作者单位

    Agcy Def Dev Ground Technol Res Inst Daejeon 34186 South Korea;

    Korea Res Inst Stand & Sci Adv Instrumentat Inst Opt Imaging & Metrol Team 267 Gajeong Ro Daejeon South Korea;

    Korea Res Inst Stand & Sci Adv Instrumentat Inst Opt Imaging & Metrol Team 267 Gajeong Ro Daejeon South Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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