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首页> 外文期刊>Optics and Lasers in Engineering >Three-dimensional reconstruction of super-resolved white-light interferograms based on deep learning
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Three-dimensional reconstruction of super-resolved white-light interferograms based on deep learning

机译：基于深度学习的超分辨白光干扰图的三维重建

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摘要

White-light scanning interferometry is an effective and widely used technology for measuring the microscopic three-dimensional morphology of an object. Its vertical resolution can reach the sub-nanometer level, and its lateral resolution reaches submicron level. However, for the samples containing complex structure or high-density periodic distribution structural units, the measurement results are strongly restricted by magnification and numerical aperture (NA) of the microscopic objective. In this paper, we proposed a three-dimensional reconstruction algorithm for white-light interferograms after super resolution processing, using fast super-resolution convolutional neural networks (FSRCNN) to improve the detailed information of the interferograms, and then we used centroid method combined with the five-step phase-shift method to extract the zero optical path difference (ZOPD) position of the interference signal after super resolution processing. After processed by the proposed method, the interferograms collected by the 10X microscope objective (NA= 0.3) recovered the 3D surface is the same as that measured by the 100X microscope objective (NA= 0.7), which is proved by the experiment results.
机译：白光扫描干涉测量是一种有效且广泛使用的技术，用于测量物体的微观三维形态。其垂直分辨率可以达到亚纳米级水平，其横向分辨率达到亚微米水平。然而，对于含有复杂结构或高密度周期性分布结构单元的样品，测量结果受显微镜物镜的倍率和数值孔径（NA）的强制性限制。在本文中，我们提出了一种三维重建算法，用于超级分辨率处理后的白光干扰图，使用快速超分辨率卷积神经网络（FSRCNN）来改善干涉图的详细信息，然后我们使用了质心方法在超分辨率处理之后提取干扰信号的零光路径（ZOPD）位置的五步相移方法。通过所提出的方法处理后，由10X显微镜物镜（NA = 0.3）收集的干涉图回收了3D表面与通过100x显微镜物镜（NA = 0.7）测量的相同，这通过实验结果证明。

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  • 来源
    《Optics and Lasers in Engineering》 |2021年第10期|106663.1-106663.8|共8页
  • 作者

    Xin Lei; Liu Xin; Yang Zhongming; Zhang Xingyu; Gao Zhishan; Liu Zhaojun;

  • 作者单位

    Shandong Univ Sch Informat Sci & Engn Jinan 250100 Peoples R China|Shandong Univ Shandong Prov Key Lab Laser Technol & Applicat Jinan 250100 Peoples R China;

    Shandong Univ Sch Informat Sci & Engn Jinan 250100 Peoples R China|Shandong Univ Shandong Prov Key Lab Laser Technol & Applicat Jinan 250100 Peoples R China;

    Shandong Univ Sch Informat Sci & Engn Jinan 250100 Peoples R China|Shandong Univ Shandong Prov Key Lab Laser Technol & Applicat Jinan 250100 Peoples R China|Nanjing Univ Sci & Technol Sch Elect & Opt Engn Xiao Lingwei Rd 200 Nanjing 210094 Jiangsu Peoples R China;

    Shandong Univ Sch Informat Sci & Engn Jinan 250100 Peoples R China|Shandong Univ Shandong Prov Key Lab Laser Technol & Applicat Jinan 250100 Peoples R China;

    Nanjing Univ Sci & Technol Sch Elect & Opt Engn Xiao Lingwei Rd 200 Nanjing 210094 Jiangsu Peoples R China;

    Shandong Univ Sch Informat Sci & Engn Jinan 250100 Peoples R China|Shandong Univ Shandong Prov Key Lab Laser Technol & Applicat Jinan 250100 Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    White-light interference; Super-resolution; Deep learning;

    机译：白光干扰;超级分辨率;深度学习;

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