Complex periodic microanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams

X. JiaT. Q. JiaL. E. DingP. X. Xiong L. Deng Z. R. Sun Z. G. Wang J. R. Qiu and Z. Z. Xu

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Complex periodic microanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams

机译：三飞秒激光束的干涉在6H-SiC晶体上形成复杂的周期性微/纳米结构

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We reported three types of complex microanostructures on 6H-SiC crystal induced by the interferences ofnthree femtosecond laser beams by arranging three types of laser polarization combinations. The micronanostructures are composed of two parts: two-dimensional long-periodic micropatterns determined by theninterferential intensity pattern and short-periodic nanopatterns determined by the interferential polariza-ntion pattern. Theoretical calculation indicates that the different polarization combinations will lead to a dis-ntinct complex interferential polarization pattern and intensity pattern, and they accord well with the ex-nperimental results. © 2009 Optical Society of America

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《Optics Letters》 |2009年第6期|p.788-790|共3页
作者
X. JiaT. Q. JiaL. E. DingP. X. Xiong L. Deng Z. R. Sun Z. G. Wang J. R. Qiu and Z. Z. Xu;
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Department of Physics, State Key Laboratory of Precision SpectroscopyEast China Normal University, Shanghai 200062, China2State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics,Shanghai 201800, China* Corresponding author: tqjia@phy.ecnu.edu.cn;

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1. Complex periodic microanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams [J] . X. Jia, T. Q. Jia, L. E. Ding, Optics Letters . 2009,第6期

机译：三飞秒激光束的干涉在6H-SiC晶体上形成复杂的周期性微/纳米结构
2. Laser-induced periodic surface structures on 6H-SiC single crystals using temporally delayed femtosecond laser double-pulse trains [J] . Juan Song, Wenjun Tao, Hui Song, Applied Physics . 2016,第4pta1期

机译：使用时间延迟飞秒激光双脉冲序列在6H-SiC单晶上产生激光诱导的周期性表面结构
3. Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation [J] . X.J. WU, T.Q. JIA, F.L. ZHAO, Applied Physics. A, Materials Science & Processing . 2007,第4期

机译：飞秒激光烧蚀在6H-SiC晶体表面形成周期性的纳米粒子和纳米波纹均匀阵列的形成机理
4. Multiphoton-induced periodic microstructures inside bulk polymers by multibeam femtosecond laser interference [C] . Jinhai Si, Zhichong Meng, Jianrong Qiu, Conference on Semiconductor and Organic Optoelectronic Materials and Devices . 2005

机译：多光子诱导的散装聚合物中的周期微结构通过多浊飞秒激光干扰
5. Effect of Beam Parameters on Femtosecond Laser Induced Surface Structures on Titanium and Copper [D] . Biswas, Sanchari. 2020

机译：光束参数对钛和铜的飞秒激光诱导表面结构的影响
6. Microanostructures formation by femtosecond laser surface processing on amorphous and polycrystalline Ni60Nb40 [O] . Edwin Peng, Alfred Tsubaki, Craig A. Zuhlke, -1

机译：飞秒激光表面处理在非晶态和多晶Ni60Nb40上形成的微/纳米结构
7. Fabrication of Complex Micro/Nanopatterns on Semiconductors by the Multi-beam Interference of Femtosecond Laser [O] . Jia Xin, Dong Lingling 2014

机译：飞秒激光的多光束干涉在半导体上制备复杂的微/纳米图案

Complex periodic microanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams

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