Adaptive optimization of a hologram in holographic femtosecond laser processing system

Satoshi Hasegawa* and Yoshio Hayasaki

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Adaptive optimization of a hologram in holographic femtosecond laser processing system

机译：全息飞秒激光加工系统中全息图的自适应优化

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In holographic parallel laser processing, precise control of diffraction peaks is important for fabricating enor-nmous numbers of nanometer-scale structures. Although an optimized hologram has high uniformity of thenpeaks in a computer reconstruction, in practice, the uniformity is decreased owing to the spatial propertiesnof the optical system. A novel optimization method based on peak intensity measurement is proposed to im-nprove the uniformity. The method automatically incorporates the properties of the optical system into thenhologram. Improved holographic femtosecond laser processing with this adaptive optimization isndemonstrated. © 2008 Optical Society of America

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《Optics Letters》 |2009年第1期|p.22-24|共3页
作者
Satoshi Hasegawa* and Yoshio Hayasaki;
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Center for Optical Research and Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya,Tochigi, 321-8585, Japan* Corresponding author: hasegawa_s@opt.utsunomiya-u.ac.jp;

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1. Adaptive optimization of a hologram in holographic femtosecond laser processing system [J] . Satoshi Hasegawa, Yoshio Hayasaki Optics Letters . 2009,第1期

机译：全息飞秒激光加工系统中全息图的自适应优化
2. Design and fabrication of an optimum holographic optical element lens for a femtosecond laser pulse using a hologram computer-aided design tool [J] . Awatsuji Y, Shiuchi Y, Komatsu A, Optics and Lasers in Engineering . 2006,第9期

机译：使用全息图计算机辅助设计工具设计和制造飞秒激光脉冲的最佳全息光学元件透镜
3. In-system optimization of a hologram for high-stability parallel laser processing [J] . Zhang Honghao, Hasegawa Satoshi, Takahashi Hidetomo, Optics Letters . 2020,第12期

机译：用于高稳定性平行激光加工的全息图的系统优化
4. In-system optimization of hologram for holographic femtosecond laser processing [C] . Honghao Zhang, Satoshi Hasegawa, Yoshio Hayasaki International Conference on Holography, Diffractive Optics, and Applications . 2019

机译：全息图全息图的系统内部优化，用于全息飞秒激光加工
5. Design, construction and optimization of a femtosecond laser spectrometer to study excited state processes. [D] . Cheng, Karen A. W. Y. 2005

机译：飞秒激光光谱仪的设计，构造和优化，用于研究激发态过程。
6. Optimized holographic femtosecond laser patterning method towards rapid integration of high-quality functional devices in microchannels [O] . Chenchu Zhang, Yanlei Hu, Wenqiang Du, -1

机译：优化的全息飞秒激光图案化方法可在微通道中快速集成高质量的功能器件
7. Method for holographic femtosecond laser parallel processing using digital blazed grating and the divergent spherical wave [O] . Chaowei Wang, Yahui Su, Jinli Wang, 2015

机译：用数字闪光光栅和发散球面波的全息飞秒激光并行处理方法
8. Progress Toward Adaptive Integration and Optimization of Automated and Neural Processing Systems: Establishing Neural and Behavioral Benchmarks of Optimized Performance. [R] . Ries, A. J., Gibson, L., Touryan, J., 2014

机译：自适应集成和自动化和神经处理系统优化的进展：建立优化性能的神经和行为基准。

Adaptive optimization of a hologram in holographic femtosecond laser processing system

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