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Optical characterization of GaN microcavity fabricated by wet etching

机译:湿法刻蚀制备的GaN微腔的光学表征

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摘要

We report a novel technique to fabricate gallium nitride (GaN) microcavities by combining the methods of photo-enhanced wet chemical oxidation and crystallographic etching. Such GaN microcavities exhibit mirror-like vertical facets composing of {1100}GaN and various gemoetry of hexagonal, trigonal and cylindrical shapes. The emission spectra of the GaN micro-cavities are found in resonance with the whispering gallery (WG) modes when pumped with a 266 nm Nd:YAG laser. The signatures of GaN microcavities were further characterized by an increase of the WG mode spacing with the reduced device size and suppression of the side mode emission intensity with pump intensity.
机译:我们报告了一种通过结合光增强湿化学氧化和晶体蚀刻方法来制造氮化镓(GaN)微腔的新技术。这样的GaN微腔表现出由{1100} GaN和六边形,三角形和圆柱形状的各种宝石构成的镜面状垂直小面。当用266 nm Nd:YAG激光器泵浦时,发现GaN微腔的发射光谱与耳语画廊(WG)模式共振。 GaN微腔的特征还在于,随着器件尺寸的减小,WG模式间距的增加以及泵浦强度对侧模发射强度的抑制。

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