Cross-plane thermal conductivity of (Ti,W)N/(Al,Sc)N metal/semiconductor superlattices

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• 来源
  《Physical review》 |2016年第4期|045311.1-045311.11|共11页
• 作者

  Bivas Saha; Yee Rui Koh; Jonathan Comparan; Sridhar Sadasivam; Jeremy L. Schroeder; Magnus Garbrecht; Amr Mohammed; Jens Birch; Timothy Fisher; Ali Shakouri; Timothy D. Sands;

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• 作者单位

  School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA,Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA,Department of Materials Science and Engineering, University of California at Berkeley, Berkeley, CA 94720, USA;

  School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA,Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA;

  School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA,Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA;

  School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907, USA,Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA;

  Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linkoeping University, SE-581 83 Linkoeping, Sweden;

  Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linkoeping University, SE-581 83 Linkoeping, Sweden;

  School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA,Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA;

  Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linkoeping University, SE-581 83 Linkoeping, Sweden;

  School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907, USA,Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA;

  School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA,Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA;

  Bradley Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, Virginia Tech, Blacksburg, Virginia 24061, USA;

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