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首页> 外文期刊>Physical review >Thermally induced surface instability in ion-implanted Mg_xZn_(1-x)O films
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Thermally induced surface instability in ion-implanted Mg_xZn_(1-x)O films

机译：离子注入Mg_xZn_（1-x）O薄膜中的热诱导表面不稳定性

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摘要

Thermal stability of originally single crystalline wurtzite Mg_xZn_(1-x)O (x ≤ 0.3) films implanted at room temperature with ~166Er ions is studied by a combination of Rutherford backscattering spectrometry, time-of-flight elastic recoil detection analysis, x-ray diffraction analysis, and atomic force microscopy. The MgZnO films exhibit a complex behavior during postimplantation annealing associated with compositional changes and surface erosion in addition to Er accumulation at the surface. The importance of these processes depends on the Mg content, annealing temperature, and amount of implantation damage. Specifically, increases in the Mg content as well as the implantation damage enhance the compositional changes in the near-surface region and give rise to altered stoichiometry and Mg-enriched phase separation. In its turn, the rate of surface erosion in MgZnO under the thermal treatment depends on temperature, MgZnO composition, and the amount of implantation damage nontrivially, which is attributed to the compositional changes in the near-surface region assisted by the implantation damage.
机译：通过Rutherford背散射光谱，飞行时间弹性反冲检测分析，x-射线衍射分析和原子力显微镜。 MgZnO膜在注入后的退火过程中表现出复杂的行为，除了表面上的Er积累外，还与成分变化和表面腐蚀有关。这些过程的重要性取决于Mg含量，退火温度和注入破坏的程度。具体而言，Mg含量的增加以及注入损伤会增强近表面区域的成分变化，并导致化学计量比的变化和Mg富集的相分离。反过来，热处理后MgZnO中的表面腐蚀速率取决于温度，MgZnO组成和注入损伤的数量，这主要归因于注入损伤辅助下的近表面区域的组分变化。

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  • 来源
    《Physical review》 |2011年第1期|p.014114.1-014114.7|共7页
  • 作者

    A. Yu. Azarov; A. Hallen; X. L. Du; Z. L. Liu; B. G. Svensson; A. Yu. Kuznetsov;

  • 作者单位

    Department of Physics, University of Oslo, P.O. Box 1048, Blindern, NO-0316 Oslo, Norway;

    ICT-MAP, Royal Institute of Technology, Electrum 229, SE-164 40, Kista-Stockholm, Sweden;

    Institute of Physics, The Chinese Academy of Sciences, Beijing 100190, China;

    Institute of Physics, The Chinese Academy of Sciences, Beijing 100190, China;

    Department of Physics, University of Oslo, P.O. Box 1048, Blindern, NO-0316 Oslo, Norway;

    Department of Physics, University of Oslo, P.O. Box 1048, Blindern, NO-0316 Oslo, Norway;

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  • 正文语种 eng
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  • 关键词

    thermal stability; thermal effects; kinetics of defect formation and annealing;

    机译：热稳定性;热效应;缺陷形成和退火的动力学;

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