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Waveguide-enhanced grazing-incidence small-angle x-ray scattering of buried nanostructures in thin films

机译：薄膜中埋藏纳米结构的波导增强掠入射小角度X射线散射

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摘要

X-ray standing waves generated by the interference of the scattered x rays from parallel surfaces of a thin film, the so-called waveguide effect, can be used to enhance or reduce the scatterings from certain depths of the film. Used in combination with grazing-incidence small-angle x-ray scattering, this resonance effect provides depth sensitivity to extract buried structures in thin films of polymer and polymeranoparticle nanocomposite, which are not readily accessible by most surface techniques, such as scanning probe microscopy. We developed a rigorous theory of the diffuse scattering in the framework of the distorted-wave Born approximation using a discretization method analogous to Parratt's recursive formalism. In such a case, the distortion of the electric field of the unperturbed state from the nanostructures of interest is considered in a self-consistent manner. This theory allows a quantitative determination of the buried nanostructures when the x-ray waveguide enhancement is present or the size of the nanostructures of interest is comparable to or larger than the spatial frequency of electric-field intensity modulation. A unique capability afforded by this theory is that a nanometer or even subnanometer spatial resolution can be achieved in the depth information of the buried nanostructures, along with the in-plane correlation of the structures.
机译：通过散射来自薄膜平行表面的X射线的干扰而产生的X射线驻波，即所谓的波导效应，可用于增强或减少薄膜某些深度的散射。与掠入射小角度X射线散射结合使用时，这种共振效应可提供深度敏感性，以提取聚合物和聚合物/纳米颗粒纳米复合材料薄膜中的埋藏结构，而大多数表面技术（例如扫描探针）均不易接近这些结构显微镜检查。我们使用类似于Parratt的递归形式主义的离散化方法，在畸变波Born近似的框架内开发了严格的散射理论。在这种情况下，以自洽的方式考虑了来自感兴趣的纳米结构的不受干扰状态的电场的畸变。当存在X射线波导增强或感兴趣的纳米结构的尺寸与电场强度调制的空间频率相当或大于电场强度调制的空间频率时，此理论允许对埋入的纳米结构进行定量确定。该理论提供的独特功能是，可以在掩埋纳米结构的深度信息中获得纳米甚至亚纳米的空间分辨率，以及结构的面内相关性。

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  • 来源
    《Physical review》 |2011年第7ptab期|p.075440.1-075440.13|共13页
  • 作者

    Zhang Jiang; Dong Ryeol Lee; Suresh Narayanan; Jin Wang;

  • 作者单位

    X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA Sunil K. Sinha Department of Physics, University of California San Diego, La Jolla, California 92093, USA;

    X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA Sunil K. Sinha Department of Physics, University of California San Diego, La Jolla, California 92093, USA;

    X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA Sunil K. Sinha Department of Physics, University of California San Diego, La Jolla, California 92093, USA;

    X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA Sunil K. Sinha Department of Physics, University of California San Diego, La Jolla, California 92093, USA;

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  • 正文语种 eng
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  • 关键词

    thin film structure and morphology; nanoscale materials and structures: fabrication and characterization;

    机译：薄膜的结构和形态;纳米级的材料和结构：制造和表征;

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