Stable Elasticity Of Epitaxial Cu Thin Films On Si

N. Nakamura; H. Ogi; M. Hirao

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Stable Elasticity Of Epitaxial Cu Thin Films On Si

机译：Si上外延Cu薄膜的稳定弹性

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In epitaxial films, large elastic strain originating from the lattice misfit with the substrate remains, and it could affect the elastic stiffness. However, we found that epitaxially grown Cu thin films on (001) Si show exceptionally stable stiffness: the average out-of-plane elastic constant throughout the film thickness was independent of the film thickness and of the annealing procedure up to 150 ℃. We calculated the strain dependence of the elastic constants using the higher-order elastic constants and confirmed that the misfit strain with the substrate hardly affects the stiffness in the particular case of Cu(001) thin films.

机译：在外延膜中，由于晶格与基板不匹配而产生的大弹性应变仍然存在，并且可能影响弹性刚度。然而，我们发现在（001）Si上外延生长的Cu薄膜表现出格外稳定的刚度：整个膜厚的平均平面外弹性常数与膜厚以及最高150℃的退火工艺无关。我们使用高阶弹性常数计算了弹性常数的应变相关性，并确认了在特殊情况下Cu（001）薄膜中与基板的失配应变几乎不影响刚度。

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《Physical review》 |2008年第24期|795-800|共6页
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N. Nakamura; H. Ogi; M. Hirao;
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acoustical measurements and instrumentation;

机译：声学测量和仪器;

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机译：高质量的外延Cu2O薄膜（111） - 通过快速热氧化从单晶Cu（111）薄膜获得的百分比高原晶粒
2. Normal state resistivity of underdoped YBa sub(2)Cu sub(3)O sub(x) thin films and La sub(2-x)Sr sub(x)CuO sub(4) ultra-thin films under epitaxial strain [J] . Trappeniers Lieven, Wagner Patrick, Teniers Gerd, Journal of Low Temperature Physics . 1999,第3期

机译：外延应变下掺杂不足的YBa亚（2）Cu亚（3）O亚（x）薄膜和La亚（2-x）Sr亚（x）CuO亚（4）超薄膜的常态电阻率
3. Normal State Resistivity of Underdoped YBa_2Cu_3O_x Thin Films and La_(2-x)Sr_xCuO_4 Ultra-Thin Films under Epitaxial Strain [J] . Lieven Trappeniers, Johan Vanacken, Patrick Wagner Journal of Low Temperature Physics . 1999,第3a4期

机译：外延应变下掺YBa_2Cu_3O_x薄膜和La_（2-x）Sr_xCuO_4超薄膜的正态电阻率
4. Magneto-elastic anisotropy in epitaxial Cu/Ni/Cu/Ni/sub 60/Cu/sub 40/Cu 001 thin films [C] . Lauhoff, G., Vaz, . 1999

机译：外延Cu / Ni / Cu / Ni / sub 60 / Cu / sub 40 / Cu 001薄膜的磁弹性各向异性
5. SUPERCONDUCTING PROPERTIES OF EPITAXIAL YBa2Cu3O7-8 THIN FILMS AND YBa2Cu3O7-8/PrBa2Cu3O7-8 HETEROSTRUCTURES GROWN BY PULSED LASER DEPOSITION [D] . Inam, Arun. 1992

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6. Epitaxial growth of Cu(001) thin films onto Si(001) using a single-step HiPIMS process [O] . Felipe Cemin, Daniel Lundin, Clarisse Furgeaud, -1

机译：使用单步HiPIMS工艺将Cu（001）薄膜外延生长到Si（001）上
7. Normal State Resistivity of Underdoped YBa2Cu3Ox Thin Films and La2-xSrxCuO4 Ultra-Thin Films under Epitaxial Strain [O] . Trappeniers, L., Vanacken, J., Wagner, P., 1999

机译：欠掺杂YBa2Cu3Ox薄膜的正常状态电阻率外延应变下的La2-xsrxCuO4超薄膜

Stable Elasticity Of Epitaxial Cu Thin Films On Si

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