近年，様々な産業分野において，加工の微細化及び高精度化が求められている．このようなニーズを満足する工具の材料にほ高い剛性及びじん性が求められており，これらの要求を満足する材料の多くは硬ぜい性材料である．しかし，切削や研削等の機械的除去加工により硬ぜい性材料を加工する場合，材料のクラックの発生や，工具の損耗等の問題のため，今後要求される高精度を達成することは困難である．また，工具の微細化及び工具表面への三次元微細構造の付加等の要求に対応することも難しい．%Fine and precise machining are required in various industrial sectors. The tool with high durability and reliability for such machine process is almost made of hard and brittle materials, and it is generally unmachinable. The focused ion beam (FIB) machining is one of the most promising nano-machining technologies for machining of hard and brittle material. In this study, surface hardness and surface roughness of hard and brittle material after machining with FIB are discussed. Covariance structure modeling of the nano-machining process with FIB results in connections between machining conditions and irradiated material characteristics. The results show that the increasing beam diameter prevents the decrease of surface hardness and the increase of surface roughness after the machining with FIB.
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