産業用精密機器の分野では高精度化に従い振動許容条件が厳rnしくなっている．そのため同機器への外乱伝達を抑制するためrnにアクティブ除振装置が用いられる．一般に除振装置は地面rnと除振台の間にアクチュエータとして空気ばねを，センサとしrnて位置と加速度センサを備え，位置フィードバック（以降，FBrnと略記）および加速度FBが同時に施される．%Precision instrument has maximum permissible vibration in the field of precision positioning. An anti-vibration apparatus has been widely used to restrain floor vibration in this field. In order to avoid the deformation of main body supported by air springs and to eliminate air spring stiffness, the control system of anti-vibration apparatus having the positive feedback using differential signal of relative position was previously proposed. However disturbance suppression characteristic of conventional system is not well because the differential operation increases high frequency sensor noises. Therefore, the positive feedback using integrated signal of relative acceleration is proposed. This system has the elimination function of air spring stiffness and good disturbance suppression characteristic. Then, this paper firstly explains the elimination function of air spring stiffness in this system. Secondly, the disturbance suppression characteristics of this system are compared with that of conventional system. Finally, the problem of implementation due to the high-gain feedback is explained.
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