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首页> 外文期刊>精密工学会誌 >OPTICAL SURFACE GENERATION OF KDP INORGANIC NONLINEAR OPTICAL CRYSTALS BY ULTRAPRECISON SURFACE GRINDING
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OPTICAL SURFACE GENERATION OF KDP INORGANIC NONLINEAR OPTICAL CRYSTALS BY ULTRAPRECISON SURFACE GRINDING

机译：超精密表面研磨技术产生KDP无机非线性光学晶体的光学表面

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摘要

Potassium dihydrogen phosphate (KH_2PO_4) called KDP was ground by an ultraprecision surface grinder having a glass-ceramic spindle of extremely-low thermal expansion with various cup-type resinoid-bonded diamond wheels under various grinding fluids. Grinding fluid is a key factor of performing ultraprecision grinding of KDP crystal, because the crystal is extremely deliquescent .The grinding modes such as ductile, ductile & fracture, and fracture modes are affected by the grinding speed, depth of cut, feed per wheel revolution, average grain size of diamond wheels. The surface rooughness depends upon the grinding direction, grain size, feed per wheel revolution, viscosity of silicone oil and kind of alcohol as an additive. The optical surface of 0.553nm rms,3.40nm Ry in surface roughness ,measured with TOPO-2D,40 X HAS BEEN OBTAINED BY USING sd 5000-75-B diamond wheel after grinding of LHG-8 laser glass with a mixture of 10cSt silicone oil and 5wt heptanol as grinding fluid.
机译：磷酸二氢钾（KH_2PO_4）被称为KDP的超精密平面磨床，该磨床具有极低的热膨胀率的玻璃陶瓷主轴，并在各种研磨液下具有各种杯形树脂键合的金刚石砂轮。研磨液是KDP晶体进行超精密研磨的关键因素，因为该晶体极易潮解，而研磨模式（例如延性，延性和断裂以及断裂模式）受研磨速度，切削深度，每轮进给量的影响，金刚石砂轮的平均晶粒尺寸。表面粗糙度取决于研磨方向，晶粒尺寸，每轮旋转的进给量，硅油的粘度以及作为添加剂的酒精的种类。在LHG-8激光玻璃与10cSt硅酮的混合物研磨后，使用sd 5000-75-B金刚石砂轮获得TOPO-2D，40 X光学表面粗糙度为0.553nm rms，Ry为3.40nm Ry油和5wt％的庚醇作为研磨液。

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