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首页> 外文期刊>精密工学会誌 >Direct joule's heat crystallization treatment of TiNi thin film micro actuator -Deformation characteristics and crystal structure of reversible TiNi thin film-
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Direct joule's heat crystallization treatment of TiNi thin film micro actuator -Deformation characteristics and crystal structure of reversible TiNi thin film-

机译：TiNi薄膜微致动器的直接焦耳热结晶处理-可逆TiNi薄膜的变形特性和晶体结构-

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摘要

The several characteristics of TiNi thin films treated by the new method, direct Joule's heat crystallization treatment method, were compared with those treated by conventional heat treatment method in an electrical furnace. As the results, the followings were clarified for reversible TiNi thin films: (1)the crystal compositions of the TiNi thin films treated by the new method were same as those by the conventional method, (2) moreover, the TiNi thin films treated by the new method were deformed larger than those by the conventional method, and (3) The optimum heat treatment condition for producing larger deformable TiNi thin film is found as 600℃ x 1minute.
机译：比较了用新方法直接焦耳热结晶处理方法处理的TiNi薄膜的几个特性与在电炉中通过常规热处理方法处理的那些特性。结果，澄清了可逆TiNi薄膜的以下内容：（1）通过新方法处理的TiNi薄膜的晶体组成与常规方法的晶体组成相同，（2）此外，通过新方法处理的TiNi薄膜。与传统方法相比，新方法的变形更大，并且（3）发现生产更大的可变形TiNi薄膜的最佳热处理条件为600℃x 1分钟。

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