Variation of interface morphology of multilayers irradiated by high energy ion beams

Ali M.Ektessabi; Kenji Io; Yoshiaki Kakino

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Variation of interface morphology of multilayers irradiated by high energy ion beams

机译：高能离子束辐照多层膜界面形貌的变化

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When a thin film on a substrate, or a multilayer thin film is irradiated by an ion beam, surface, interface, and the films undergo extensive changes as a result of ion beam induced mixing phenomena. The aim of this study is to use high energy ion beam mixing at the interface between a multilayer and substrate, and to investigate the parameters which can be used to control the mixing profile and the width of mixing layers. Au (30nm)- C(400nm)-Au(30nm) multilayers were deposited on Si and C substrates.

机译：当用离子束辐照基板上的薄膜或多层薄膜时，由于离子束引起的混合现象，薄膜会发生广泛的变化。这项研究的目的是在多层与基底之间的界面处使用高能离子束混合，并研究可用于控制混合轮廓和混合层宽度的参数。在Si和C基板上沉积Au（30nm）-C（400nm）-Au（30nm）多层膜。

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来源
《精密工学会誌》 |1997年第7期|p.997-1001|共5页
作者
Ali M.Ektessabi; Kenji Io; Yoshiaki Kakino;
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原文格式 PDF
正文语种 jpn
中图分类机械制造工艺;仪器、仪表;
关键词
ion beam mixing; multilayer; ballistic effect;

机译：离子束混合;多层弹道效应;

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专利

1. Ion mixing in multilayer films and the doping of the near-surface layers of polycrystalline substrates under irradiation by ion beams with a wide energy spectrum [J] . Kalin B.A., Volkov N.V., Oleinikov I.V. Bulletin of the Russian Academy of Sciences. Physics . 2012,第6期

机译：在宽能谱的离子束辐照下，多层膜中的离子混合和多晶衬底近表面层的掺杂
2. Effect of Irradiation by High-Energy Electron and Ion Beams on the Variation of Critical Parameters of Second-Generation YBCO(123) Tapes [J] . V. P. Aksenov, L. Kh. Antonova, A. G. Belov, Doklady. Physics . 2009,第10期

机译：高能电子束和离子束辐照对第二代YBCO（123）磁带临界参数变化的影响
3. Tuning the electronic properties of LaAlO_3/SrTiO_3 interfaces by irradiating the LaAlO_3 surface with low-energy cluster ion beams [J] . Karl Ridier, Damien Aureau, Bruno Berini, Physical review . 2018,第3期

机译：通过用低能簇离子束照射LaAlO_3表面来调整LaAlO_3 / SrTiO_3界面的电子性能
4. Changes in Surface Morphology of Ti6Al4V Alloy and ZrO2-Y2O3 Oxides Coating Irradiated by High-Intensity Pulsed Ion Beams [C] . . 2006

机译：高强度脉冲离子束辐照的Ti6Al4V合金和ZrO2-Y2O3氧化物涂层的表面形貌变化
5. Multilayer Interface Tracking Model of Zircaloy Corrosion Under Irradiation [D] . Reyes, Michael Patrick 2018

机译：辐照下锆石腐蚀的多层界面跟踪模型
6. Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces [O] . S. Gurbán, P. Petrik, M. Serényi, -1

机译：室温下电子辐照在金属氧化物/ Si界面上形成无定形SiO2；在界面上写入电子束
7. Tuning the Electronic Properties of LAO/STO Interfaces by Irradiating LAO Surface with Low-Energy Cluster Ion Beams [O] . Ridier, Karl, Aureau, Damien, Bérini, Bruno, 2017

机译：通过辐照调整LaO / sTO接口的电子特性具有低能团簇离子束的LaO表面
8. Tables of Energy-Deposition Distributions in Water Phantoms Irradiated by Point-Monodirectional Electron Beams with Energies from 1 to 60 MeV, and Applications to Broad Beams [R] . Berger, M. J. , Seltzer, S. M. 1982

机译：具有1至60 meV能量的点 - 单向电子束辐照的水体模中能量沉积分布表，以及对宽光束的应用

Variation of interface morphology of multilayers irradiated by high energy ion beams

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