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An in-process measurement probe for profile generation with using No datum

机译:用于不使用基准的轮廓生成的在线测量探针

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摘要

This paper presents newly developed force controllable measurement probes which will be used for profile generation with using no external reference. These probes are able to perform measurement and fabrication simultaneously. Measurement ability of probe type 1, which has cantilever and lapping pad, is tested experimentally. The results of this experiment indicate that the repeatability error increases with measurement force, because the lapping pad inclines when it is pressed to the test surface. Probe type 2 is developed to solve this problem.
机译:本文介绍了新开发的力可控测量探头,这些探头将在不使用外部参考的情况下用于生成轮廓。这些探针能够同时执行测量和制造。实验测试了具有悬臂和研磨垫的1型探头的测量能力。该实验的结果表明,重复性误差随测量力的增加而增加,因为研磨垫在压向测试表面时会倾斜。开发了2型探头可解决此问题。

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