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首页> 外文期刊>精密工学会誌 >MACHINING ERROR REDUCTION BY A NEGATIVE COMPLIANCE DEVICE - AN APPLICATION TO A FACE GRINDING MACHINE-
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MACHINING ERROR REDUCTION BY A NEGATIVE COMPLIANCE DEVICE - AN APPLICATION TO A FACE GRINDING MACHINE-

机译：负柔顺装置降低加工误差-在平面磨床中的应用-

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摘要

Deformation of a machining system due to machining force is a major cause of decrease in product preciseness. Generally, to increase the preciseness, rigidity of frame, chuck and tool of the machining system is to be reinforced. This induces increase of size, mass and complexity of the system .The authors propose an another approach. By employing a negative compliance device, it is possible to compensate deformation of the machining system caused by machining force. In this paper, a machining system with the negative compliance device is analyzed. Control conditions for stabilization and compensation are shown .A 3-axis negative compliance system is realized by using a ring-shaped active force sensor. To confirm reduction of machining error, the negative compliance system is applied to a face grinding machine of silicon wafers. Through experiments of grinding wafers ,it is confirmed that the error can be reduced from 0.9μm to less than 0.1μm with cutting depth of 10μm.
机译：由于加工力引起的加工系统的变形是降低产品精度的主要原因。通常，为了提高精度，要增强加工系统的框架，卡盘和工具的刚性。这引起了系统的规模，质量和复杂性的增加。作者提出了另一种方法。通过采用负顺应性装置，可以补偿由加工力引起的加工系统的变形。本文分析了带有负柔度装置的加工系统。显示了稳定和补偿的控制条件。通过使用环形主动力传感器实现了三轴负柔度系统。为了确认减少加工误差，将负柔度系统应用于硅片的平面磨床。通过对晶片的磨削实验，可以确认，切削深度为10μm时，误差可以从0.9μm减小到小于0.1μm。

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