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首页> 外文期刊>Proceedings of the institution of mechanical engineers >A piezoelectric inchworm actuator of linear type using symmetrical lever amplification
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A piezoelectric inchworm actuator of linear type using symmetrical lever amplification

机译：使用对称杠杆放大的线性压电压电蠕虫执行器

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摘要

Piezoelectric inchworm actuators have a wide application in the field of nano-positioning and ultra-precision detecting instruments. Ultra-precision positioning equipments are urgently needed in the field of precision optics. A new piezoelectric linear actuator, based on inchworm motion principle, with a symmetry lever displacement amplification mechanism has been designed in this article. The whole structure adopts uniaxial-type double-notch right circular flexible hinge as its main hinges, which offers the driving part a larger displacement and makes clamping part have enough clamping force at the same time. High-precision cross roller guide ways are utilized to improve the positioning accuracy of the actuator. Both theoretical analysis and finite element analysis of clamping mechanism and driving mechanism have been carried out. An experimental test platform has been built, and a controlling program of the actuator is compiled by LabVIEW The experimental results show that the working stroke of the actuator is ± 25 mm, resolution is 60 nm, the clamping force is 17 N, and the bearing capacity is 11 N; the actuator has a highest speed of 1.259 mm/s at the driving voltage 150 V.
机译：压电寸虫执行器在纳米定位和超精密检测仪器领域中有着广泛的应用。在精密光学领域迫切需要超精密定位设备。本文设计了一种基于尺虫运动原理的新型压电线性致动器，其具有对称的杠杆位移放大机构。整个结构采用单轴型双缺口右圆形挠性铰链作为主铰链，给驱动部分提供更大的位移，使夹紧部分同时具有足够的夹紧力。高精度的交叉滚子导轨可提高执行器的定位精度。对夹紧机构和驱动机构进行了理论分析和有限元分析。建立了实验测试平台，并通过LabVIEW编写了执行器的控制程序。实验结果表明，执行器的工作行程为±25mm，分辨率为60nm，夹紧力为17N，轴承容量为11 N;在150 V的驱动电压下，执行器的最高速度为1.259 mm / s。

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