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首页> 外文期刊>Proceedings of the institution of mechanical engineers >Design and fabrication of a microelectromechanical systems polymeric micropump
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Design and fabrication of a microelectromechanical systems polymeric micropump

机译：微机电系统聚合物微型泵的设计与制造

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This article introduces a polymeric micropump actuated by a PbZrTiO_3 (lead zirconate titanate) bimorph. The pump body was made of polymethyl methacrylate substrate, and the passive valves were fabricated by SU-8 lift-off technique. First, the vibration performances of parts including lead zirconate titanate, membrane and valve were analyzed by finite element model. Then, the valve unit was assembled by ultrasonic bonding. An energy director was designed on the valve deck to realize precise positioning of the valve components. Finally, the flow performance of the micropump was studied by frequency-sweeping experiments, and the experimental results approximately coincided with the finite element model analysis. Under the driving frequency of 550 Hz and voltage of 210 V (peak-peak), the maximum flow rate reached 18.2 mL/min. This study provides an effective and a reliable way to fabricate polymeric micropumps.
机译：本文介绍了一种由PbZrTiO_3（钛酸锆钛酸铅）双压电晶片驱动的聚合物微泵。泵体由聚甲基丙烯酸甲酯基板制成，被动阀采用SU-8提升技术制造。首先，通过有限元模型分析了锆钛酸铅，膜和阀等零件的振动性能。然后，通过超声结合组装阀单元。在阀座上设计了能量导向器，以实现阀组件的精确定位。最后，通过扫频实验研究了微型泵的流动性能，实验结果与有限元模型分析基本吻合。在550 Hz的驱动频率和210 V（峰-峰值）的电压下，最大流速达到18.2 mL / min。这项研究提供了一种有效且可靠的方法来制造聚合物微型泵。

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