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首页> 外文期刊>Proceedings of the National Academy of Sciences of the United States of America >Soft-lithographic replication of 3D microstructures with closed loops
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Soft-lithographic replication of 3D microstructures with closed loops

机译:具有闭环的3D微结构的软光刻复制

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摘要

There is growing interest in lithographic technologies for creating 3D microstructures. Such techniques are generally serial in nature, prohibiting the mass production of devices. Soft-lithographic techniques show great promise for simple and rapid replication of arrays of microstructures but have heretofore not been capable of direct replication of structures with closed loops. We demonstrate that 3D microstructures created with multiphoton absorption polymerization can be replicated by using microtransfer molding to afford complex daughter structures containing closed loops. This method relieves many of the topological constraints of soft lithography, paving the way for the large-scale replication of true 3D microstructures.
机译:用于创建3D微结构的光刻技术越来越受到关注。这样的技术通常本质上是串行的,从而禁止了设备的大量生产。软光刻技术显示出简单而快速地复制微结构阵列的巨大前景,但是迄今为止还不能用闭环直接复制结构。我们证明了可以通过使用微传递模塑来复制由多光子吸收聚合产生的3D微观结构,以提供包含闭环的复杂子结构。该方法消除了软光刻的许多拓扑约束,为大规模复制真实的3D微观结构铺平了道路。

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