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Micromachined inertial sensors

机译：微机械惯性传感器

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摘要

This paper presents a review of silicon micromachined accelerometers and gyroscopes. Following a brief introduction to their operating principles and specifications, various device structures, fabrication, technologies, device designs, packaging, and interface electronics issues, along with the present status in the commercialization of micromachined inertial sensors, are discussed. Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 10/spl times/ every two years during the past eight years. This impressive drive to higher performance, lower cost, greater functionality, higher levels of integration, and higher volume will continue as new fabrication, circuit, and packaging techniques are developed to meet the ever increasing demand for inertial sensors.
机译：本文介绍了硅微机械加速度计和陀螺仪的综述。在简要介绍了它们的工作原理和规格之后，讨论了各种设备结构，制造，技术，设备设计，封装和接口电子学问题，以及微机械惯性传感器的商业化现状。惯性传感器的性能一直在稳步提高，今天，微加速度计可以解决微克范围内的加速度，而过去八年中，陀螺仪的性能每两年提高10 / spl次/倍。随着开发新的制造，电路和封装技术以满足对惯性传感器不断增长的需求，这种对更高性能，更低成本，更好功能，更高集成度和更大体积的令人印象深刻的驱动将继续。

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