The design and fabrication of microelectro-mechanical systems (MEMS) devices are developing apace, and the promise of ready markets is quite overwhelming. As the name suggests, however, the mechanical behavior of these devices is critical to their use and durability. The mechanical behavior of the device can be divided into two critical components: material properties and device-design performance. Stated another way, the materials to be used should have desirable mechanical properties and the device design should properly utilize these properties.
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